Journal ArticleDOI
Piezoelectric-on-Silicon Lateral Bulk Acoustic Wave Micromechanical Resonators
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TLDR
In this article, the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components is presented.Abstract:
This paper reports on the design, fabrication, and characterization of piezoelectrically-transduced micromechanical single-crystal-silicon resonators operating in their lateral bulk acoustic modes to address the need for high-Q microelectronic-integrable frequency-selective components. A simple electromechanical model for optimizing performance is presented. For verification, resonators were fabricated on 5-mum-thick silicon-on- insulator substrates and use a 0.3-mum zinc oxide film for transduction. A bulk acoustic mode was observed from a 240 mum times 40 mum resonator with a 600-Omega impedance (Q=3400 at P=1 atm) at 90 MHz. A linear resonator absorbed power of -0.5 dBm and an output current of 1.3 mA rms were measured. The same device also exhibited a Q of 12 000 in its fundamental extensional mode at a pressure of 5 torr.read more
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Proceedings ArticleDOI
High Performance pMEMS™ oscillators - The next generation frequency references
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Proceedings ArticleDOI
Out-of-plane piezoelectric microresonator and oscillator circuit for monitoring engine oil contamination with diesel
J. Toledo,Tomas Manzaneque,Víctor Ruiz-Díez,F. Jiménez-Márquez,M. Kucera,G. Pfusterschmied,E. Wistrela,Ulrich Schmid,José Luis Sánchez-Rojas +8 more
TL;DR: In this paper, two out-of-plane modes for the monitoring of oil dilution with diesel have been selected: the first one (12-mode) is working at 51 kHz and the second mode (14-mode), at 340 kHz.
Journal ArticleDOI
Multimodal characterisation of high-Q piezoelectric micro-tuning forks
Marta Gil,Tomas Manzaneque,J. Hernando-García,Abdallah Ababneh,Helmut Seidel,José Luis Sánchez-Rojas +5 more
TL;DR: This work presents an electrically actuated, aluminium nitride based, piezoelectric tuning fork designed at the micro-scale for selective modal actuation, showing promising results.
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Nonlinear limits for single-crystal silicon microresonators
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