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Journal ArticleDOI

Block copolymer based nanostructures: materials, processes, and applications to electronics.

Ho-Cheol Kim, +2 more
- 01 Jan 2010 - 
- Vol. 110, Iss: 1, pp 146-177
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TLDR
A comparison study of how three different approaches to placement control of block Copolymer Ordering in Thin Films changed the quality of the films they produced.
Abstract
2.4. Block Copolymer Containing Hybrids 151 3. Block Copolymer Ordering in Thin Films 153 3.1. General Process Steps 153 3.2. Morphology of Thin Films 154 3.3. Thickness-Dependent Nanopatterning 154 3.3.1. Ultrathin Films: Monomolecular Films 155 3.3.2. Sub-L0 Thick Films 155 3.3.3. Thick Films 157 3.4. Placement Control: Directed Self-Assembly (DSA) 162 3.4.1. Topographic Guiding Patterns: Graphoepitaxy 163

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Citations
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Journal ArticleDOI

Photoinduced optical anisotropy in azobenzene containing block copolymer–homopolymer blends. Influence of microstructure and molecular weight

TL;DR: In this paper, the photo-induced birefringence normalized to the azo content has been found in two diblock methacrylic azo polymers and in some of their blends with PMMA of different molecular weights as well as their photoinduced anisotropy.
Journal ArticleDOI

Ordering block copolymers with structured electrodes

TL;DR: It is demonstrated that a combination of graphoepitaxy and a homogeneous electric field extends the maximal distance between the topographical guiding patterns that result in defect-free ordering compared to graphoEPitaxy alone.
Journal ArticleDOI

Solvent-induced morphological transitions in methacrylate-based block-copolymer aggregates

TL;DR: The results disclose the fascinating potential of PEO-b-PBMA copolymers for the templated synthesis of nanostructured materials and offer a guideline to fine-tune their properties by accurately selecting the THF/water ratio.
Journal ArticleDOI

Contact holes patterning by directed self-assembly of block copolymers: process window study

TL;DR: In this paper, a process window for directed self-assembly (DSA) of polystyrene-b-polymethylmethacrylate block copolymers (BCPs) is determined as a function of guiding pattern dimensions and BCP molecular weights corresponding to BCP natural periods.
Journal ArticleDOI

Hybrid line–dot nanopatterns from directed self-assembly of diblock copolymers by trenches

TL;DR: It is demonstrated that the directed self-assembly of AB diblock copolymers by periodic trenches can be used to fabricate large-scale ordered hybrid line-dot nanopatterns in addition to a defect-free dot nanop attern, confirming their feasibility in kinetics.
References
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Journal ArticleDOI

Ordered mesoporous molecular sieves synthesized by a liquid-crystal template mechanism

TL;DR: In this paper, the synthesis of mesoporous inorganic solids from calcination of aluminosilicate gels in the presence of surfactants is described, in which the silicate material forms inorganic walls between ordered surfactant micelles.
Journal ArticleDOI

Block Copolymer Thermodynamics: Theory and Experiment

TL;DR: Block copolymers are macromolecules composed of sequences, or blocks, of chemically distinct repeat units that make possible the sequential addition of monomers to various carbanion-ter­ minated ("living") linear polymer chains.
Journal ArticleDOI

Block Copolymers—Designer Soft Materials

TL;DR: The Knitting Pattern as mentioned in this paper is a block copolymer that was discovered by Reimund Stadler and his coworkers and reflects a delicate free-energy minimization that is common to all blockcopolymer materials.
Journal ArticleDOI

Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates

TL;DR: A simple, robust, chemical route to the fabrication of ultrahigh-density arrays of nanopores with high aspect ratios using the equilibrium self-assembled morphology of asymmetric diblock copolymers is shown.
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