Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth
Peter O. Weigel,Jie Zhao,Kelvin Fang,Hasan Al-Rubaye,Douglas C. Trotter,Dana Hood,John Mudrick,Christina Dallo,Andrew Pomerene,Andrew Starbuck,Christopher T. DeRose,Anthony L. Lentine,Gabriel M. Rebeiz,Shayan Mookherjea +13 more
TLDR
This hybrid Si-LN MZM achieves beyond 106 GHz 3-dB electrical modulation bandwidth, the highest of any silicon photonic or lithium niobate (phase) modulator.Abstract:
We demonstrate an ultra-high-bandwidth Mach-Zehnder electro-optic modulator (EOM), based on foundry-fabricated silicon (Si) photonics, made using conventional lithography and wafer-scale fabrication, oxide-bonded at 200C to a lithium niobate (LN) thin film. Our design integrates silicon photonics light input/output and optical components, such as directional couplers and low-radius bends. No etching or patterning of the thin film LN is required. This hybrid Si-LN MZM achieves beyond 106 GHz 3-dB electrical modulation bandwidth, the highest of any silicon photonic or lithium niobate (phase) modulator.read more
Citations
More filters
Journal ArticleDOI
High-performance hybrid silicon and lithium niobate Mach–Zehnder modulators for 100 Gbit s −1 and beyond
Mingbo He,Mengyue Xu,Yuxuan Ren,Jian Jian,Ziliang Ruan,Yongsheng Xu,Shengqian Gao,Shihao Sun,Xueqin Wen,Lidan Zhou,Lin Liu,Changjian Guo,Hui Chen,Siyuan Yu,Liu Liu,Xinlun Cai +15 more
TL;DR: In this paper, the authors demonstrate a Mach-Zehnder modulator with high linearity, high bandwidth, and low manufacturing cost on a silicon and lithium niobate hybrid integration platform.
Journal ArticleDOI
High-Performance Hybrid Silicon and Lithium Niobate Mach-Zehnder Modulators for 100 Gbit/s and Beyond
Mingbo He,Mengyue Xu,Yuxuan Ren,Jian Jian,Ziliang Ruan,Yongsheng Xu,Shengqian Gao,Shihao Sun,Xueqin Wen,Lidan Zhou,Lin Liu,Changjian Guo,Hui Chen,Siyuan Yu,Liu Liu,Xinlun Cai +15 more
TL;DR: In this article, a Mach-Zehnder modulator with high-contrast waveguide based on a Silicon and Lithium Niobate hybrid integration platform has been demonstrated for high-speed, energy efficient and cost-effective optical communication networks.
Journal ArticleDOI
Integrated photonics on thin-film lithium niobate
Di Zhu,Linbo Shao,Mengjie Yu,Rebecca Cheng,Boris Desiatov,C. J. Xin,Yaowen Hu,Jeffrey Holzgrafe,Soumya Ghosh,Amirhassan Shams-Ansari,Eric Puma,Neil Sinclair,Christian Reimer,Mian Zhang,Marko Loncar +14 more
TL;DR: In this article, the authors present a review of the state-of-the-art integrated thin-film LNOI photonics, including the materials, basic passive components, and various active devices based on electro-optics, all-optical nonlinearities, and acousto-optic.
Journal ArticleDOI
High-performance coherent optical modulators based on thin-film lithium niobate platform
Mengyue Xu,Mingbo He,Hongguang Zhang,Jian Jian,Ying Pan,Xiaoyue Liu,Lifeng Chen,Xiangyu Meng,Hui Chen,Zhaohui Li,Xi Xiao,Shaohua Yu,Siyuan Yu,Xinlun Cai +13 more
TL;DR: In this article, LiNiobate-on-insulator based in-phase/quadrature (IQ) electro-optic modulators are proposed for coherent transmission.
Journal ArticleDOI
Self-starting bi-chromatic LiNbO 3 soliton microcomb
Yang He,Qi-Fan Yang,Jingwei Ling,Rui Luo,Hanxiao Liang,Mingxiao Li,Boqiang Shen,Heming Wang,Kerry J. Vahala,Qiang Lin +9 more
TL;DR: In this article, a soliton microcomb was demonstrated in a monolithic high-Q LN resonator, where the LN soliton mode-locking process self-starts and allows bi-directional switching of soliton states.
References
More filters
Journal ArticleDOI
A review of lithium niobate modulators for fiber-optic communications systems
Ed Wooten,K.M. Kissa,A. Yi-Yan,E.J. Murphy,D.A. Lafaw,P.F. Hallemeier,D. Maack,D.V. Attanasio,D.J. Fritz,G.J. McBrien,D.E. Bossi +10 more
TL;DR: The lithium-niobate external-modulator technology meets the performance and reliability requirements of current 2.5-, 10-Gb/s digital communication systems, as well as CATV analog systems, and multiple high-speed modulation functions have been achieved in a single device.
Journal ArticleDOI
Losses in single-mode silicon-on-insulator strip waveguides and bends.
Yurii A. Vlasov,Sharee J. McNab +1 more
TL;DR: The fabrication and accurate measurement of propagation and bending losses in single-mode silicon waveguides with submicron dimensions fabricated on silicon-on-insulator wafers with record low numbers can be used as a benchmark for further development of silicon microphotonic components and circuits.
Journal ArticleDOI
Physical mechanisms of transient enhanced dopant diffusion in ion-implanted silicon
Peter Stolk,H.-J. Gossmann,D. J. Eaglesham,Dale Conrad Jacobson,Conor S. Rafferty,G. H. Gilmer,Martín Jaraíz,J. M. Poate,H. S. Luftman,T. E. Haynes +9 more
TL;DR: In this paper, transmission electron microscopy measurements of implantation damage were combined with B diffusion experiments using doping marker structures grown by molecular-beam epitaxy (MBE) to study the mechanisms of TED.
Journal ArticleDOI
Electro–optically tunable microring resonators in lithium niobate
TL;DR: In this paper, the first realization of optical microring resonators in submicrometre thin films of lithium niobate was reported, where high-index contrast films were produced by an improved crystal-ion-slicing and bonding technique using benzocyclobutene.