Journal ArticleDOI
Piezoresistance Coefficients of (100) Silicon nMOSFETs Measured at Low and High ( $\sim$ 1.5 GPa) Channel Stress
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In this article, a flexure-based four-point mechanical wafer bending setup is used to apply large uniaxial tensile stress (up to 1.2 GPa) on industrial nMOSFETs with 0 to ~700 MPa of process-induced stress.Abstract:
A flexure-based four-point mechanical wafer bending setup is used to apply large uniaxial tensile stress (up to 1.2 GPa) on industrial nMOSFETs with 0 to ~700 MPa of process-induced stress. This provides the highest uniaxial channel stress to date at ~1.5 GPa. The stress altered drain-current is measured for long and short (50-140 nm) devices and the extracted pi-coefficients are observed to be approximately constant for stresses up to ~1.5 GPa. For short devices, this trend is seen only after correcting for the significant degradation in the pi-coefficients observed due to parasitic source/drain series resistances (Rsd/)read more
Citations
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Journal ArticleDOI
Review: Semiconductor Piezoresistance for Microsystems
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Journal ArticleDOI
Strain: A Solution for Higher Carrier Mobility in Nanoscale MOSFETs
TL;DR: In this paper, the impact of strain on carrier mobility in Si n-and pMOSFETs by considering strain-induced band splitting, band warping and consequent carrier repopulation, and altered conductivity effective mass and scattering rate is discussed.
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Journal ArticleDOI
Understanding Strain-Induced Drive-Current Enhancement in Strained-Silicon n-MOSFET and p-MOSFET
Stefan Flachowsky,Andy Wei,Ralf Illgen,Tom Herrmann,Jan Höntschel,Manfred Horstmann,W. Klix,R. Stenzel +7 more
TL;DR: In this paper, applied electrical fields are used to experimentally study different state-of-the-art local and global strain techniques and reveal the different responses of n- and p-MOSFETs to the different strain techniques.
Journal ArticleDOI
Strain engineering and mechanical assembly of silicon/germanium nanomembranes
TL;DR: In this article, a review of the recent progress in strain engineering and mechanical assembly of semiconductor NMs is presented, ranging from fundamental principles to device applications, with a focus on Si/Ge NMs.
References
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Yuan Taur,Tak H. Ning +1 more
TL;DR: In this article, the authors highlight the intricate interdependencies and subtle tradeoffs between various practically important device parameters, and also provide an in-depth discussion of device scaling and scaling limits of CMOS and bipolar devices.
Journal ArticleDOI
Piezoresistance Effect in Germanium and Silicon
TL;DR: In this article, the complete tensor piezoresistance has been determined experimentally for these materials and expressed in terms of the pressure coefficient of resistivity and two simple shear coefficients.
Journal ArticleDOI
A logic nanotechnology featuring strained-silicon
Scott E. Thompson,Mark Armstrong,C. Auth,S. Cea,R. Chau,G. Glass,T. Hoffman,Jason Klaus,Z. Ma,B. McIntyre,Anand Portland Murthy,B. Obradovic,Lucian Shifren,Swaminathan Sivakumar,S. Tyagi,Tahir Ghani,Kaizad Mistry,Mark T. Bohr,Y. El-Mansy +18 more
TL;DR: In this article, a tensile Si nitride-capping layer is used to introduce tensile uniaxial strain into the n-type MOSFET and enhance electron mobility.
Journal ArticleDOI
Six-band k⋅p calculation of the hole mobility in silicon inversion layers: Dependence on surface orientation, strain, and silicon thickness
TL;DR: In this paper, a six-band k⋅p model has been used to study the mobility of holes in Si inversion layers for different crystal orientations, for both compressive or tensile strain applied to the channel, and for a varying thickness of the Si layer.
Book
Flexures: Elements of Elastic Mechanisms
TL;DR: Flexure Design: Advantages and Disadvantages of Flexures as discussed by the authors The main advantages and disadvantages of flexible design are: Basic Elasticity. Fatigue. Vibrations and Natural Frequencies of Continuous Systems.