Journal ArticleDOI
Structural dynamics of microsystems—current state of research and future directions
Rongming Lin,W.J. Wang +1 more
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In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.About:
This article is published in Mechanical Systems and Signal Processing.The article was published on 2006-07-01. It has received 105 citations till now.read more
Citations
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Journal ArticleDOI
Experimental study of the effect of hydrodynamic coupling of micro-cantilever array on the dynamic response of micro-cantilever
TL;DR: In this paper, the effect of hydrodynamic coupling of a micro-cantilever array on the dynamic response of a CCA was investigated, and it was shown that the quality factor of an operating CCA can be controlled by changing the phase and magnitude of excitation force on auxiliary cantevers, and varying the gap between auxiliarycantevers and operating cantever.
Journal ArticleDOI
Reliability of the bi-stable piezoelectric energy harvester under random excitation
TL;DR: In this article , the reliability of a bi-stable piezoelectric energy harvester excited by Gaussian white noise is investigated and the conditional reliability function and the mean first-passage time are derived through the backward Kolmogorov equation and the generalized Pontryagin equation associated with the averaged stochastic differential equation.
Proceedings ArticleDOI
A Modelling Approach for Coupling Numerical Analytical Techniques Applied in Microsystems
TL;DR: In this article, a method for the integration of several numerical analytical techniques that are used in microsystems design and failure analysis is presented, which consists of three stages, namely reduced order modeling, deterministic optimization and probabilistic optimization.
Proceedings ArticleDOI
A base excitation device with PZT for MEMS dynamic testing under high temperature environment
Dongsheng She,Yiliu Yang +1 more
TL;DR: In this paper, an impact base excitation device was developed to excite silicon microcantilevers under the temperature ranging from room temperature to 500°C, an electric heating plate was used as the heating element to heat the testing microstructure.
References
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Book
Theory of plates and shells
TL;DR: In this article, the authors describe the bending of long RECTANGULAR PLATES to a cycloidal surface, and the resulting deformation of shels without bending the plates.
Book
Fundamentals of microfabrication
TL;DR: The second edition of the Fundamentals of Microfabrication as discussed by the authors provides an in-depth coverage of the science of miniaturization, its methods, and materials, from the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering.
Book
Microsystem Design
TL;DR: In this article, a minor numerical error in going from Eq. 16.39 to eq.16.40 is found, which has an obvious effect on the calculations that follow, increasing the minimum detectable temperature change to about 2 mK.
Book
Micromachined Transducers Sourcebook
TL;DR: In this paper, the authors present an overview of Micromachining Techniques, Mechanical Transducers, Optical Transducers and Ionizing Radiation Transducers for Microfluidic Devices.