Journal ArticleDOI
Structural dynamics of microsystems—current state of research and future directions
Rongming Lin,W.J. Wang +1 more
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In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.About:
This article is published in Mechanical Systems and Signal Processing.The article was published on 2006-07-01. It has received 105 citations till now.read more
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Thermoelastic Damping in Micro- and Nano-Mechanical Systems.
Ron Lifshitz,Michael L. Roukes +1 more
Abstract: The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer- and nanometer-scale electromechanical systems. The equations of linear thermoelasticity are used to give a simple derivation for thermoelastic damping of small flexural vibrations in thin beams. It is shown that Zener’s well-known approximation by a Lorentzian with a single thermal relaxation time slightly deviates from the exact expression.
Journal ArticleDOI
Size-dependent vibration of a microplate under the action of a moving load based on the modified couple stress theory
TL;DR: In this article, a forced vibration analysis of a microplate subjected to a moving load is presented, which is based on the modified couple stress theory in conjunction with Kirchhoff-love plate theory.
Journal ArticleDOI
An improved interface and noise analysis of a turning fork microgyroscope structure
TL;DR: In this article, different noise components in MEMS gyroscope silicon structure, including mechanical thermal noise (MTN), electronic-thermal noise (ETN), flicker noise (FN), and Coriolis signal in-phase noise (IPN), were analyzed in sense open loop.
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Fault detection and diagnosis based on parameter set estimation
Vasso Reppa,Anthony Tzes +1 more
TL;DR: In this article, a fault detection and diagnosis strategy is proposed for the supervision of linearly parametrisable, time-invariant systems subject to abrupt parameter variations, relying on a variation of a set membership identification (SMI) approach.
Journal ArticleDOI
Estimation of oscillation period/switching time for electrostatically actuated microbeam type switches
M. M. Joglekar,D. N. Pawaskar +1 more
TL;DR: In this article, the undamped dynamic response of step-voltage driven parallel-plates, cantilever, and fixed-fixed type electromechanical switches is numerically investigated.
References
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Book
Theory of plates and shells
TL;DR: In this article, the authors describe the bending of long RECTANGULAR PLATES to a cycloidal surface, and the resulting deformation of shels without bending the plates.
Book
Fundamentals of microfabrication
TL;DR: The second edition of the Fundamentals of Microfabrication as discussed by the authors provides an in-depth coverage of the science of miniaturization, its methods, and materials, from the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering.
Book
Microsystem Design
TL;DR: In this article, a minor numerical error in going from Eq. 16.39 to eq.16.40 is found, which has an obvious effect on the calculations that follow, increasing the minimum detectable temperature change to about 2 mK.
Book
Micromachined Transducers Sourcebook
TL;DR: In this paper, the authors present an overview of Micromachining Techniques, Mechanical Transducers, Optical Transducers and Ionizing Radiation Transducers for Microfluidic Devices.