Journal ArticleDOI
Structural dynamics of microsystems—current state of research and future directions
Rongming Lin,W.J. Wang +1 more
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In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.About:
This article is published in Mechanical Systems and Signal Processing.The article was published on 2006-07-01. It has received 105 citations till now.read more
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Journal ArticleDOI
Electrostatic pull-in instability in MEMS/NEMS: A review
TL;DR: In this paper, a review of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices is presented, along with physical principles that have enabled fundamental insights into the pullin instability as well as pullin induced failures.
Journal ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal ArticleDOI
Review on the Modeling of Electrostatic MEMS
TL;DR: The physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices are introduced.
Proceedings ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal Article
Viscous air damping in laterally driven microresonators
William C. Tang,Xia Zhang +1 more
TL;DR: Tang et al. as discussed by the authors investigated the damping effects due to different geometries and compared to theory, and showed that if edge and finite-size effects are included in the model, reasonably accurate predictions of the quality factors can be obtained even for small geometry and comb drives, and derived an empirical formula that predicts the quality factor for a range of plate sizes and comb designs.
References
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Journal ArticleDOI
Static and dynamic aspects of an air-gap capacitor
TL;DR: In this article, a single-element approach for the electrostatic excitation and capacitive detection of the vibrational motion of the resonators is described, and the behavior of the air-gap capacitor is modeled as a lumped spring-mass system and its limitations are discussed.
Journal ArticleDOI
The fabrication and use of micromachined corrugated silicon diaphragms
TL;DR: In this paper, a capacitive pressure sensor was fabricated using these techniques with a full-scale sensitivity of 1 mmHg, using a corrugated diaphragm with a thickness between 0.6 and 8 μm.
Journal ArticleDOI
Very high Q-factor resonators in monocrystalline silicon
R.A. Buser,N. F. de Rooij +1 more
TL;DR: In this paper, the authors presented a method to solve the SAMLAB-ARTICLE-1990-002 Record created on 2009-05-12, modified on 2016-08-08
Journal ArticleDOI
Air damping in laterally oscillating microresonators: a numerical and experimental study
TL;DR: In this paper, the authors investigated computing air damping in a comb-drive resonator by numerically solving the three-dimensional Stokes equation for the entire resonator using the FastStokes solver.
Journal ArticleDOI
A micromachined, single-crystal silicon, tunable resonator
J J Yao,N C MacDonald +1 more
TL;DR: In this article, the authors present a fully integrated, single-crystal silicon (SCS), micromachined tunable resonator with a natural resonant frequency of nominally 1 MHz and a room temperature quality factor approaching 10,000 in vacuum.