Journal ArticleDOI
Structural dynamics of microsystems—current state of research and future directions
Rongming Lin,W.J. Wang +1 more
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In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.About:
This article is published in Mechanical Systems and Signal Processing.The article was published on 2006-07-01. It has received 105 citations till now.read more
Citations
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Journal ArticleDOI
Electrostatic pull-in instability in MEMS/NEMS: A review
TL;DR: In this paper, a review of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices is presented, along with physical principles that have enabled fundamental insights into the pullin instability as well as pullin induced failures.
Journal ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal ArticleDOI
Review on the Modeling of Electrostatic MEMS
TL;DR: The physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices are introduced.
Proceedings ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal Article
Viscous air damping in laterally driven microresonators
William C. Tang,Xia Zhang +1 more
TL;DR: Tang et al. as discussed by the authors investigated the damping effects due to different geometries and compared to theory, and showed that if edge and finite-size effects are included in the model, reasonably accurate predictions of the quality factors can be obtained even for small geometry and comb drives, and derived an empirical formula that predicts the quality factor for a range of plate sizes and comb designs.
References
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Book
Fundamentals of Vibrations
L Meirovitch,Robert G. Parker +1 more
TL;DR: In this article, the Fourier series is used to measure the response of a single-degree-of-freedom system to initial and non-periodic oscillations, respectively.
Journal ArticleDOI
Thermoelastic damping in micro- and nanomechanical systems
Ron Lifshitz,Michael L. Roukes +1 more
TL;DR: In this paper, the importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer-and nanometer-scale electromechanical systems.
Journal ArticleDOI
Internal friction in solids. i. theory of internal friction in reeds
TL;DR: In this article, the internal friction associated with this hybrid type of vibration is calculated from thermodynamical considerations, and it is predicted that the internal interferences are of a larger order of magnitude than that due to all other causes.
Proceedings ArticleDOI
Laterally driven polysilicon resonant microstructures
TL;DR: In this article, interdigitated finger structures are used for electrostatically exciting the resonance of polysilicon microstructures parallel to the plane of the substrate, with frequencies ranging from 18 kHz to 80 kHz and quality factors from 20 to 130.