Journal ArticleDOI
Structural dynamics of microsystems—current state of research and future directions
Rongming Lin,W.J. Wang +1 more
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TLDR
In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.About:
This article is published in Mechanical Systems and Signal Processing.The article was published on 2006-07-01. It has received 105 citations till now.read more
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Proceedings ArticleDOI
Full-scale field evaluation of wireless MEMS monitoring system
TL;DR: In this paper, the authors developed and verified the wireless micro-electro-mechanical system (MEMS) monitoring system for the health monitoring of high rise buildings, which has advantages of small size, low-cost and low power consumption, and is suitable for wireless monitoring.
Modeling of high speed micro rotors in moderate flowconfinement
TL;DR: In this article, thermal and flow induced effects on the rotor dynamics of geometries with moderate flow confinement are studied. But the authors do not consider the effect of temperature on the air gap.
Proceedings ArticleDOI
Reliability of etching angle estimation of MEMS resonators from electrical measurements
TL;DR: In this paper, an analytical expression of the electrostatic force and squeeze-film damping taking into account the non-ideal verticality of the electrodes due to the etching process is presented.
Journal ArticleDOI
Flow-Induced Instability on High-Speed Mini Rotors in Laminar Flow
TL;DR: In this paper, a modeling approach is developed to examine laminar flow effects on the rotordynamic behavior of high-speed mini rotating machinery with a moderate flow confinement, where flow-induced forces resulting from the surrounding fluid are analyzed and these models are combined with the structural finite element (FE) models for determining the rotor dynamic behavior.
References
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Book
Theory of plates and shells
TL;DR: In this article, the authors describe the bending of long RECTANGULAR PLATES to a cycloidal surface, and the resulting deformation of shels without bending the plates.
Book
Fundamentals of microfabrication
TL;DR: The second edition of the Fundamentals of Microfabrication as discussed by the authors provides an in-depth coverage of the science of miniaturization, its methods, and materials, from the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering.
Book
Microsystem Design
TL;DR: In this article, a minor numerical error in going from Eq. 16.39 to eq.16.40 is found, which has an obvious effect on the calculations that follow, increasing the minimum detectable temperature change to about 2 mK.
Book
Micromachined Transducers Sourcebook
TL;DR: In this paper, the authors present an overview of Micromachining Techniques, Mechanical Transducers, Optical Transducers and Ionizing Radiation Transducers for Microfluidic Devices.