Journal ArticleDOI
Structural dynamics of microsystems—current state of research and future directions
Rongming Lin,W.J. Wang +1 more
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In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.About:
This article is published in Mechanical Systems and Signal Processing.The article was published on 2006-07-01. It has received 105 citations till now.read more
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Journal ArticleDOI
Electrostatic pull-in instability in MEMS/NEMS: A review
TL;DR: In this paper, a review of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices is presented, along with physical principles that have enabled fundamental insights into the pullin instability as well as pullin induced failures.
Journal ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal ArticleDOI
Review on the Modeling of Electrostatic MEMS
TL;DR: The physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices are introduced.
Proceedings ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal Article
Viscous air damping in laterally driven microresonators
William C. Tang,Xia Zhang +1 more
TL;DR: Tang et al. as discussed by the authors investigated the damping effects due to different geometries and compared to theory, and showed that if edge and finite-size effects are included in the model, reasonably accurate predictions of the quality factors can be obtained even for small geometry and comb drives, and derived an empirical formula that predicts the quality factor for a range of plate sizes and comb designs.
References
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Proceedings ArticleDOI
Noninvasive measurements of structural damage by laser scanning vibrometer: an experimental comparison among different exciters
TL;DR: In this paper, a non-invasive diagnostic system is proposed and compared using different kinds of structural exciters, such as laser vibrometers and acoustic stimulation, which can be used to locate defects position and size.
Journal ArticleDOI
Noncontacting excitation and measurement of light structures
TL;DR: In this paper, an ellipsoid cavity has been constructed which is designed to emit focused plane wave excitation over an area of 1 in. diameter, thus approximating to point excitation.
Journal ArticleDOI
Mechanical limitations in the performance of integrated acoustic sensors
R.N. Tait,A.W. Mitchell +1 more
TL;DR: In this article, measurements of diaphragm deflection are made for both silicon and silicon nitride (SiN) diaphrasms, and large-deflection measurements are obtained at a deflection-to-thickness ratio significantly larger than one.
Journal ArticleDOI
A single-chip diaphragm-type miniature Fabry?Perot pressure sensor with improved cross-sensitivity to temperature
TL;DR: In this paper, a new micromachined Fabry-Perot (FP) cavity with a single deeply corrugated diaphragm for pressure-sensing applications is presented.