Journal ArticleDOI
Structural dynamics of microsystems—current state of research and future directions
Rongming Lin,W.J. Wang +1 more
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In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.About:
This article is published in Mechanical Systems and Signal Processing.The article was published on 2006-07-01. It has received 105 citations till now.read more
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Reliability- and performance-based robust design optimization of MEMS structures considering technological uncertainties
Adam Martowicz,Tadeusz Uhl +1 more
TL;DR: In this article, the applicability of a reliability and performance-based multi-criteria robust design optimization technique for micro-electromechanical systems, considering their technological uncertainties, is discussed.
Journal ArticleDOI
Vibrations of parallel arrays of electrostatically actuated microplates
TL;DR: In this article, small vibrations of a parallel array of microplates predeformed by an electric field were studied and closed-form expressions for the array's modal properties, including resonance frequencies, mode shapes, and modal dampings were derived.
Journal ArticleDOI
Nonlinear behaviour of electrically actuated microplate-based MEMS resonators
Mergen H. Ghayesh,Hamed Farokhi +1 more
TL;DR: In this article, the authors examined the nonlinear dynamical characteristics of an imperfect microplate-based microelectromechanical system (MEMS), taking into account geometric nonlinearities, geometric imperfections, small-size effects, and all the transverse and in-plane inertia and displacements.
Journal ArticleDOI
Design and characterization of AlN-based in-plane microplate resonators
Víctor Ruiz-Díez,Tomas Manzaneque,J. Hernando-García,Abdallah Ababneh,M. Kucera,Ulrich Schmid,Hans-Peter Seidel,José Luis Sánchez-Rojas +7 more
TL;DR: In this article, a design procedure to perform an efficient actuation of in-plane modes in piezoelectric resonators is presented, which is applied to different microplate structures, paying attention to contour modes and flexure-actuated modes.
Journal ArticleDOI
Numerical analysis of fluid–structure interaction effects on vibrations of cantilever microstructure
TL;DR: In this article, a numerical analysis of squeeze-film damping effects on free and forced vibrations of cantilever microstructure was performed using three separate finite element models, each model is based on different form of Reynolds equation: nonlinear, linearized and linearized incompressible.
References
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Book
Theory of plates and shells
TL;DR: In this article, the authors describe the bending of long RECTANGULAR PLATES to a cycloidal surface, and the resulting deformation of shels without bending the plates.
Book
Fundamentals of microfabrication
TL;DR: The second edition of the Fundamentals of Microfabrication as discussed by the authors provides an in-depth coverage of the science of miniaturization, its methods, and materials, from the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering.
Book
Microsystem Design
TL;DR: In this article, a minor numerical error in going from Eq. 16.39 to eq.16.40 is found, which has an obvious effect on the calculations that follow, increasing the minimum detectable temperature change to about 2 mK.
Book
Micromachined Transducers Sourcebook
TL;DR: In this paper, the authors present an overview of Micromachining Techniques, Mechanical Transducers, Optical Transducers and Ionizing Radiation Transducers for Microfluidic Devices.