Journal ArticleDOI
Structural dynamics of microsystems—current state of research and future directions
Rongming Lin,W.J. Wang +1 more
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In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.About:
This article is published in Mechanical Systems and Signal Processing.The article was published on 2006-07-01. It has received 105 citations till now.read more
Citations
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Journal ArticleDOI
Electrostatic pull-in instability in MEMS/NEMS: A review
TL;DR: In this paper, a review of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices is presented, along with physical principles that have enabled fundamental insights into the pullin instability as well as pullin induced failures.
Journal ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal ArticleDOI
Review on the Modeling of Electrostatic MEMS
TL;DR: The physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices are introduced.
Proceedings ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal Article
Viscous air damping in laterally driven microresonators
William C. Tang,Xia Zhang +1 more
TL;DR: Tang et al. as discussed by the authors investigated the damping effects due to different geometries and compared to theory, and showed that if edge and finite-size effects are included in the model, reasonably accurate predictions of the quality factors can be obtained even for small geometry and comb drives, and derived an empirical formula that predicts the quality factor for a range of plate sizes and comb designs.
References
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Journal ArticleDOI
Coarse-grained molecular dynamics and the atomic limit of finite elements
TL;DR: In this article, a coarse-grained molecular dynamics (CGMD) model is proposed for simulation of micron-scale solid systems, which can capture the important atomistic effects without the computational cost of conventional molecular dynamics.
BookDOI
Energy and Finite Element Methods in Structural Mechanics : SI Units Edition
Irving H. Shames,Clive L. Dym +1 more
TL;DR: In this paper, the first two parts -the foundations of solid mechanics and variational methods and the third part -explore the applicability of the finite element method to structural mechanics.
Journal ArticleDOI
Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus
TL;DR: In this article, a technique was developed for high-yield fabrication of single-crystalline-silicon cantilevers as thin as 12 nm, and the formed cantilever resonators were characterized by resonance testing in high vacuum.
Book
Energy and Finite Element Methods in Structural Mechanics
TL;DR: The Finite Element Method (FE) is the most widely used method for numerical approximation for partial differential equations defining engineering and scientific problems as mentioned in this paper, and it has been widely used in the field of structural engineering.
Journal ArticleDOI
On Isothermal Squeeze Films
TL;DR: In this article, it was shown that squeeze film damping cutoff frequencies can be computed directly from the lowest eigenvalue of the Helmholtz equation, and a kinematic mode was proposed and analyzed for the computation of those frequencies.