Journal ArticleDOI
Structural dynamics of microsystems—current state of research and future directions
Rongming Lin,W.J. Wang +1 more
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TLDR
In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.About:
This article is published in Mechanical Systems and Signal Processing.The article was published on 2006-07-01. It has received 105 citations till now.read more
Citations
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Journal ArticleDOI
Electrostatic pull-in instability in MEMS/NEMS: A review
TL;DR: In this paper, a review of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices is presented, along with physical principles that have enabled fundamental insights into the pullin instability as well as pullin induced failures.
Journal ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal ArticleDOI
Review on the Modeling of Electrostatic MEMS
TL;DR: The physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices are introduced.
Proceedings ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal Article
Viscous air damping in laterally driven microresonators
William C. Tang,Xia Zhang +1 more
TL;DR: Tang et al. as discussed by the authors investigated the damping effects due to different geometries and compared to theory, and showed that if edge and finite-size effects are included in the model, reasonably accurate predictions of the quality factors can be obtained even for small geometry and comb drives, and derived an empirical formula that predicts the quality factor for a range of plate sizes and comb designs.
References
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Journal ArticleDOI
Independent tuning of linear and nonlinear stiffness coefficients [actuators]
TL;DR: In this paper, a combination of electrostatic actuators is used to tune the linear and nonlinear stiffness coefficients of a uniaxial micromechanical device without affecting the resonant frequency or the linear stiffness.
Journal ArticleDOI
Measurement system for full three-dimensional motion characterization of MEMS
TL;DR: In this paper, a measurement system capable of stroboscopic imaging, interferometry, and digital image processing is presented for mechanically testing microelectromechanical systems (MEMS).
Journal ArticleDOI
Electrostatic model for an asymmetric combdrive
TL;DR: In this paper, an analytical solution to the electrostatic actuation of an asymmetric combdrive in out-of-plane and torsional motions is presented, where the dependence of the peak force on the thickness of the movable fingers and the amount of overlap of the combs is given in closed form.
Journal ArticleDOI
Measurement of the mechanical properties of silicon microresonators
TL;DR: In this paper, a novel technique for the simultaneous determination of the strain and Young's modulus of a silicon microresonator is reported, where the lowest two symmetric vibration modes of a single resonator are excited and their frequencies measured.
Journal ArticleDOI
Simulation studies on nonlinear dynamics and chaos in a MEMS cantilever control system
S Liu,Arthur Davidson,Qiao Lin +2 more
TL;DR: In this article, period doubling and chaos in a simulated MEMS cantilever system with electrostatic sensing and actuation, intended for a MEMS based mass storage chip, with and without servo control, were discovered.