Journal ArticleDOI
Structural dynamics of microsystems—current state of research and future directions
Rongming Lin,W.J. Wang +1 more
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In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.About:
This article is published in Mechanical Systems and Signal Processing.The article was published on 2006-07-01. It has received 105 citations till now.read more
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Journal ArticleDOI
Electrostatic pull-in instability in MEMS/NEMS: A review
TL;DR: In this paper, a review of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices is presented, along with physical principles that have enabled fundamental insights into the pullin instability as well as pullin induced failures.
Journal ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal ArticleDOI
Review on the Modeling of Electrostatic MEMS
TL;DR: The physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices are introduced.
Proceedings ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal Article
Viscous air damping in laterally driven microresonators
William C. Tang,Xia Zhang +1 more
TL;DR: Tang et al. as discussed by the authors investigated the damping effects due to different geometries and compared to theory, and showed that if edge and finite-size effects are included in the model, reasonably accurate predictions of the quality factors can be obtained even for small geometry and comb drives, and derived an empirical formula that predicts the quality factor for a range of plate sizes and comb designs.
References
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Proceedings ArticleDOI
Nonlinearity and hysteresis of resonant strain gauges
TL;DR: In this paper, the nonlinearity and hysteresis effects of the electrostatically activated voltage-driven resonant microbridges have been studied theoretically and experimentally.
Journal ArticleDOI
Quality factor of torsional resonators in the low-pressure region
TL;DR: In this paper, the authors reported the calculation of the damping factor of a torsional resonator in the low-pressure region if the vibration occurs in free space or close to another surface.
Journal ArticleDOI
On-chip decoupling zone for package-stress reduction
TL;DR: In this article, the authors report the reduction of package stresses by introducing a decoupling zone directly around a sensor structure, using the finite element method (FEM) and analytical models.
Proceedings ArticleDOI
A trajectory piecewise-linear approach to model order reduction and fast simulation of nonlinear circuits and micromachined devices
Michal Rewienski,Jacob K. White +1 more
TL;DR: This paper presents an approach to the nonlinear model reduction based on representing the non linear system with a piecewise-linear system and then reducing each of the pieces with a Krylov projection, and shows that the macromodels obtained are significantly more accurate than models obtained with linear or the recently developed quadratic reduction techniques.
Journal ArticleDOI
Disk-shaped bulk micromachined gyroscope with vacuum sealing
TL;DR: In this paper, a vacuum-sealed vibrating gyroscope using silicon bulk micromachining technology is presented, which has an angular rate detection sensitivity of approximately 8.9 μV/(° s −1 ), a nonlinearity of 1.25% FS and a detection resolution of approximately 0.2° s−1 at 1 Hz BW.