Journal ArticleDOI
Structural dynamics of microsystems—current state of research and future directions
Rongming Lin,W.J. Wang +1 more
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TLDR
In this paper, the electro-mechanical coupling of typical MEMS devices is defined and introduced, followed by an in-depth review of the various existing modeling and simulation techniques.About:
This article is published in Mechanical Systems and Signal Processing.The article was published on 2006-07-01. It has received 105 citations till now.read more
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Journal ArticleDOI
Electrostatic pull-in instability in MEMS/NEMS: A review
TL;DR: In this paper, a review of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices is presented, along with physical principles that have enabled fundamental insights into the pullin instability as well as pullin induced failures.
Journal ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal ArticleDOI
Review on the Modeling of Electrostatic MEMS
TL;DR: The physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices are introduced.
Proceedings ArticleDOI
Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators
TL;DR: In this paper, the authors provide an overview of the fundamental research on nonlinear behaviors arising in micro/nanoresonators, including direct and parametric resonances, parametric amplification, impacts, selfexcited oscillations, and collective behaviors, which arise in coupled resonator arrays.
Journal Article
Viscous air damping in laterally driven microresonators
William C. Tang,Xia Zhang +1 more
TL;DR: Tang et al. as discussed by the authors investigated the damping effects due to different geometries and compared to theory, and showed that if edge and finite-size effects are included in the model, reasonably accurate predictions of the quality factors can be obtained even for small geometry and comb drives, and derived an empirical formula that predicts the quality factor for a range of plate sizes and comb designs.
References
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Journal ArticleDOI
A MEMS-based projection display
TL;DR: The digital display engine (DDE) as discussed by the authors is based on a single DMD device having array dimensions of 800/spl times/600 elements, illuminated by a metal halide arc lamp through a compact optics train.
Journal ArticleDOI
Concurrent coupling of length scales: Methodology and application
TL;DR: In this paper, the authors describe a seamless coupling of continuum to statistical to quantum mechanics, involving an algorithm, implemented on a parallel computer, for handshaking between finite elements, molecular dynamics, and semi-empirical tight binding.
Journal ArticleDOI
High-Q HF microelectromechanical filters
TL;DR: In this article, an IC-compatible microelectromechanical intermediate frequency filters using integrated resonators with Q's in the thousands were demonstrated using polysilicon surface micromachining technology.
Journal ArticleDOI
Equivalent-circuit model of the squeezed gas film in a silicon accelerometer
TL;DR: In this paper, a new electric equivalent circuit for the forces created by a squeezed gas film between vertically moving planar surfaces is presented. Butler et al. used the circuit model to calculate the effective viscosity in a narrow gap between the moving surfaces.