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Journal ArticleDOI

Metalorganic chemical vapor deposition of III‐V semiconductors

M. J. Ludowise
- 15 Oct 1985 - 
- Vol. 58, Iss: 8
TLDR
In this paper, the metalorganic chemical vapor deposition (MOCVD) of epitaxial III-V semiconductor alloys on III-v substrates is reviewed in detail.
Abstract
The metalorganic chemical vapor deposition (MOCVD) of epitaxial III‐V semiconductor alloys on III‐V substrates is reviewed in detail. The emphasis is placed on both practical and theoretical knowledge of the equipment and deposition process. The chemistry of the source alkyls and the dynamics of the transport process are discussed. The growth of the GaAs and AlxGa1−xAs systems are treated as prototypical examples (and the most studied) of the III‐V materials. Latter sections review InP, Ga1−xInxAs, and related alloys. Finally, the antimonide and the other systems are reviewed. Electronic and optical devices fabricated from MOCVD‐grown materials are used as examples of the capabilities of the growth technique.

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Citations
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Journal ArticleDOI

The onset of transverse recirculations during flow of gases in horizontal ducts with differentially heated lower walls

TL;DR: In this article, a computational study has been performed to identify the onset of transverse buoyancy-driven recirculations during laminar flow of hydrogen and nitrogen in horizontal ducts with cool upper walls, and lower walls consisting of three sections: a cool upstream section, a heated middle section and a cool downstream section.
Journal ArticleDOI

OMVPE growth of InGaAsP materials for long wavelength detectors and emitters

TL;DR: In this paper, the epitaxial growth of InP/InGaAs PIN detectors and InGaAsP LEDs to be used for 1.3 μm fiber optic communication systems is described.
Journal ArticleDOI

Native‐oxide‐defined coupled‐stripe AlxGa1−xAs‐GaAs quantum well heterostructure lasers

TL;DR: In this article, the authors presented data on the continuous-wave (cw) room-temperature (300 K) operation of multiple stripe AlxGa1−xAs−GaAs quantum well heterostructure (QWH) laser arrays defined with native oxide contact masking.
Journal ArticleDOI

Low‐threshold disorder‐defined native‐oxide delineated buried‐heterostructure AlxGa1−xAs‐GaAs quantum well lasers

TL;DR: In this paper, the high-gap AlxGa1−xAs−GaAs upper confining layer is oxidized in a self-aligned configuration defined by the contact stripe and reduces IILD leakage currents at the crystal surface and diffused shunt junctions.
Journal ArticleDOI

Ultraviolet photoconductive devices with an n-GaN nanorod-graphene hybrid structure synthesized by metal-organic chemical vapor deposition.

TL;DR: The prominent existence of the undamaged monolayer graphene even after the growth of highly dense n-GaN NRs, as determined using Raman spectroscopy and high-resolution transmission electron microscopy, facilitated the excellent transport of the generated charge carriers through the photoconductive channel.
References
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Journal ArticleDOI

Thermal expansion of some diamondlike crystals

TL;DR: The thermal expansion of AlN, cubic BN, and BP has been measured from 77 to 1300 K by x−ray techniques as mentioned in this paper, and the derived thermal expansion coefficients are compared with those of diamond, Si, Ge, SiC, GaP, and BeO using the Debye temperature as a scaling parameter.
Journal ArticleDOI

Single-crystal gallium arsenide on insulating substrates

TL;DR: In this article, a single-crystal growth of gallium arsenide was achieved on a number of singlecrystal insulating oxide substrates, including sapphire, spinel, beryllium oxide, and thorium oxide.
Journal ArticleDOI

The Use of Metal‐Organics in the Preparation of Semiconductor Materials I . Epitaxial Gallium‐ V Compounds

TL;DR: In this article, the decomposition of alkyl-gallium compounds in the presence of arsine, phosphine, arsinesinephosphine, and stibine mixtures has been used for compound semiconductor film growth compatible with methods used for the growth of elemental semiconductors.
Journal ArticleDOI

The importance of lattice mismatch in the growth of GaxIn1−xP epitaxial crystals

TL;DR: In this paper, the importance of lattice-parameter mismatch between the GaAs substrate and the GaxIn1−xP epitaxial layer on crystal growth and properties has been investigated.
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