Eindhoven University of Technology

About: Eindhoven University of Technology is a education organization based out in Eindhoven, Noord-Brabant, Netherlands. It is known for research contribution in the topics: Catalysis & Computer science. The organization has 22309 authors who have published 52936 publications receiving 1584164 citations. The organization is also known as: Technische Hogeschool Eindhoven & TU/e.

Plasma and thermal ALD of Al2O3 in a commercial 200 mm ALD reactor

Abstract: The deposition of Al 2 O 3 by remote plasma atomic layer deposition (ALD) in the Oxford Instruments FlexAL reactor was studied and compared with results from thermal ALD in the same reactor. Trimethylaluminum [Al(CH 3 ) 3 ] was used as the metal precursor and O 2 plasma and H 2 O were used as oxidizing agents for the plasma and thermal processes, respectively. For remote plasma ALD with a total cycle time of 4 s, the growth per cycle decreased monotonically with substrate temperature, from 1.7 A/cycle at 25°C to 1.0 A/cycle at 300°C. This growth per cycle was consistently higher than that obtained for thermal ALD. For the latter a maximum growth per cycle of ∼ 1.0 A/cycle was found at 200°C. The film properties investigated were nearly independent of oxidant source for temperatures between 100 and 300°C, with a slightly higher mass density for the remote plasma ALD Al 2 O 3 films. Films deposited at 200 and 300°C were stoichiometric with a mass density of 3.0 g/cm 3 and low C (< 1 atom %) and H (<3 atom %) contents. At lower substrate temperatures, oxygen-rich films were obtained with a lower mass density and higher H-content. Remote plasma ALD produced uniform Al 2 O 3 films with nonuniformities of less than ±2% over 200 mm diam substrates. Excellent conformality was obtained for films deposited in macropores with an aspect ratio of ∼8 (2.0-2.5 μm diam). Preliminary results on electrical properties of remote plasma deposited films showed high dielectric constants of 7.8 and 8.9 for as-deposited and forming gas annealed Al 2 O 3 , respectively.

Attacking and defending the McEliece cryptosystem

Abstract: This paper presents several improvements to Stern’s attack on the McEliece cryptosystem and achieves results considerably better than Canteaut et al. This paper shows that the system with the originally proposed parameters can be broken in just 1400 days by a single 2.4GHz Core 2 Quad CPU, or 7 days by a cluster of 200 CPUs. This attack has been implemented and is now in progress. This paper proposes new parameters for the McEliece and Niederreiter cryptosystems achieving standard levels of security against all known attacks. The new parameters take account of the improved attack; the recent introduction of list decoding for binary Goppa codes; and the possibility of choosing code lengths that are not a power of 2. The resulting public-key sizes are considerably smaller than previous parameter choices for the same level of security.

APROMORE : an advanced process model repository

Abstract: Business process models are becoming available in large numbers due to their widespread use in many industrial applications such as enterprise and quality engineering projects. On the one hand, this raises a challenge as to their proper management: how can it be ensured that the proper process model is always available to the interested stakeholder? On the other hand, the richness of a large set of process models also offers opportunities, for example with respect to the re-use of existing model parts for new models. This paper describes the functionality and architecture of an advanced process model repository, named APROMORE. This tool brings together a rich set of features for the analysis, management and usage of large sets of process models, drawing from state-of-the art research in the field of process modeling. A prototype of the platform is presented in this paper, demonstrating its feasibility, as well as an outlook on the further development of APROMORE.

Stated preference and choice models applied to recreation research : a review

Abstract: This article discusses the use and usefulness of stated preference and choice models in recreation/leisure research. Stated preference and choice models require one to design decision experiments to study recreational and leisure decisions made in hypothetical or simulated markets. Historically, such experiments were uncommon in recreation and leisure research; therefore we pay particular attention to comparisons of the stated preference modeling approaches with modeling approaches based on observations of choices made in real markets, such as the analysis of discrete choices using conditional and nested multinomial logit models. The conceptual and theoretical bases of stated preference and choice models are discussed; and procedures for developing such models, including different design strategies, are outlined. Potential uses of these models in recreation research are illustrated with reference to several recent empirical applications.

Structure functions in turbulence, in various flow configurations, at Reynolds number between 30 and 5000, using extended self-similarity

Abstract: A summary of experimental results on structure functions obtained using extended self-similarity in various flow configurations (jet, grid, mixing layer, duct flow, cylinder) at Reynolds numbers ranging between 30 and 5000 is presented.