Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
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Journal ArticleDOI
Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry
M. Li,Chenggen Quan,C.J. Tay +2 more
TL;DR: In this article, a new method based on vertical scanning interferometry (VSI) for the 3D profile measurement of a micro-component that contains sharp steps is presented.
Journal ArticleDOI
Stroboscopic white-light interferometry of vibrating microstructures.
TL;DR: A LED-based stroboscopic white-light interferometer and a data analysis method that allow mapping out-of-plane surface vibration fields in electrically excited microstructures with sub-nm amplitude resolution for vibration frequencies ranging up to tens of MHz are described.
Journal ArticleDOI
Tunable phase-extraction formulae for simultaneous shape measurement of multiple surfaces with wavelength-shifting interferometry.
TL;DR: A new class of phase-shifting algorithms are introduced that fulfill requirements and allow continuous tuning of phase detection to any frequency of interest and are shown for a four-surface stack of nearparallel plates, measured in a Fizeau interferometer.
Journal ArticleDOI
Geometric and material nonlinearity during the deformation of micron-scale thin-film bilayers subject to thermal loading
Yanhang Zhang,Martin L. Dunn +1 more
TL;DR: In this paper, the authors studied the linear and geometric nonlinear behavior of thin-film bilayer mechanical structures subjected to thermal loading due to combined creep and stress relaxation, and found that both material and structural phenomena contribute to the observed deformation response.
Journal ArticleDOI
Passive vibration compensation in scanning white-light interferometry.
TL;DR: A passive vibration compensation approach in scanning white-light interferometry (SWLI) is presented and the signal reconstruction technique is improved so that the specimen's topography measurement can be obtained with the same accuracy as without any vibrations or scan distortions influence.
References
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Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.