Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
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Proceedings ArticleDOI
Off-axis reflection digital holographic microscopy for micron structure tomography measurement
TL;DR: In this paper, a single wavelength off-axis reflection digital holographic microscopy (DHM) can be applied in micron optical tomography measurement through the pre-magnification method.
Proceedings ArticleDOI
Signal processing in white-light scanning interferometry by Fourier transform and its application to surface profile measurements
TL;DR: In this paper, a general equation of the interference signal of white-light scanning interferometer and its Fourier transform is derived and simulations and experiments are performed to investigate effects of phase random noise and dispersion phase.
Proceedings ArticleDOI
Improving demodulation accuracy of low-coherence interferometer against spatial-frequency nonlinearity
Shuang Wang,Tiegen Liu,Junfeng Jiang,Kun Liu,Jinde Yin,Wu Fan,Bofu Zhao,Lei Xue,Yunqiao Mei,Wu Zhenhai +9 more
TL;DR: In this article, an effective method to compensate the spatial-frequency nonlinearity for polarized low-coherence interferometer with location-dependent dispersion element is presented. But the method is limited to the case of optical fiber Fabry-Perot (F-P) pressure sensing system.
Journal ArticleDOI
Single sequence phase shifting spectrally resolved interferometry for an in-line thin film thickness measurement using spectral reflectance and phase.
TL;DR: In this paper, a spectral reflectance phase surface (SRPS) was proposed to measure the thickness of SiO2 on a silicon substrate and compared with the commercial ellipsometer.
Journal ArticleDOI
Absolute Measurement of Aspheric Surfaces Using White-Light Interferometry
TL;DR: In this article, a new method combined with image location and a 3D stage is proposed to achieve the non-contact absolute shape measurement for aspheric and spherical surface in a slarge range.
References
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Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.