Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
Reads0
Chats0
TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
More filters
Journal ArticleDOI
Determination of film thickness and surface profile using reflectometry and spectrally resolved phase shifting interferometry
TL;DR: In this article, the authors combine reflectometry and spectrally resolved phase shifting interferometry for measurement of surface and film thickness profile with the use of Michelson objective, which is convenient to implement as compared to the Linnik type and the use does not necessarily need large number of fringes in the spectral domain.
Journal ArticleDOI
White-light interferometry with an extended zoom range
TL;DR: In this paper, a flexible set-up that can be used for both microscopic and macroscopic applications is presented, where the magnification can easily be changed in seconds and the zoom range is greater than 160.
Journal ArticleDOI
Rough surface reconstruction at grazing angles by an iterated marching method.
Yuxuan Chen,Mark Spivack +1 more
TL;DR: An iterated marching method is presented for the reconstruction of rough perfectly reflecting one-dimensional surfaces from scattered data arising from a scalar wave at grazing incidence, and the algorithm is found to exhibit a type of self-regularization.
Journal ArticleDOI
Grain morphology of molybdenum splats plasma-sprayed on glass substrates
TL;DR: In this paper, the grain structure of the oxygen-enriched molybdenum splats was observed with optical microscopy and scanning electronic microscopy, and it was found that dendrite grains align along the splat rim towards the center, suggesting that solidification is initiated at the periphery of melt splat.
Journal ArticleDOI
Optical inspection of complex patterns of microelectronics products
Joonho You,Seung-Woo Kim +1 more
TL;DR: In this article, low-coherence interferometry is exploited for the high-speed 3D inspection of microelectronics products comprised of composite features of different surface characteristics, with emphasis on configuring an optimum optical hardware design to deal with large rough objects measuring up to a few hundreds micrometers in height.
References
More filters
Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.