Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
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Proceedings ArticleDOI
A three-dimensional precision platform based on vertical scanning and its application in surface topography measurement
TL;DR: In this paper, a three-dimensional precision platform based on vertical scanning has been proposed for surface topography measurement, which is composed of a two-dimensional platform with metrology system and a vertical scanning platform.
Journal ArticleDOI
Spatially resolved thickness determination of rough thin films by reflectometry with polychromatic light.
TL;DR: A simple metrology set-up based on white light interference to determine the thickness of thin transparent films by their reflection color under white illumination and has been used as industrial inline process control for a CdS semiconductor layer on top of a rough Cu(In,Ga)(Se,S)2 thin film solar absorber.
Journal ArticleDOI
Innovative automatic resonant mode identification for nano-scale dynamic full-field characterization of MEMS using interferometric fringe analysis
TL;DR: In this article, a dynamic 3D nano-scale surface profilometer was successfully developed for automatic resonant frequency identification using stroboscopic interferometric principle, which achieved an accuracy in vertical measurement of 3-5 nm with a vertical measurement range of tens of micrometers.
Journal ArticleDOI
Choosing Identification Technologies for Implementation of Traceability in order to Increase Overall Equipment Effectiveness
TL;DR: Here, it is shown the required identification technologies in order to establish a traceability concept for assembly of discrete units and some technical possibilities inorder to enable implementation of a holistic traceability system.
Journal ArticleDOI
Potential of a wavelength sampling approach for profilometry by phase shifting interferometry
TL;DR: In this paper, the authors investigated how the field of application of phase shifting interferometry could be extended to the reconstruction of bidimensional phase maps of vibrating samples or of static samples located in a mechanically unstable environment.
References
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Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.