Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
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Journal ArticleDOI
White-light Fizeau interferometer.
TL;DR: A white-light Fizeau interferometer is described, which uses a series arrangement of a Fabry-Perot interferometers in front of a two-beam Fizeu fringes to produce white- light fringes.
Journal ArticleDOI
The metrology of a miniature FT spectrometer MOEMS device using white light scanning interference microscopy
TL;DR: In this paper, the use of white light scanning interference (WLSI) microscopy for making rapid, non-destructive precision three-dimensional measurements was investigated, and the results demonstrate that WLSI shows great potential for the rapid and precise quality control of MOEMS devices.
Journal ArticleDOI
Measurement of discontinuous surfaces using multiple-wavelength interferometry
TL;DR: In this paper, a three-wavelength interferometric technique is used with a phase-shifting phase evaluation procedure, which gives wrapped phase at any pixel corresponding to these wavelengths.
Journal ArticleDOI
Microscopic three-dimensional topometry with ferroelectric liquid-crystal-on-silicon displays
TL;DR: With this device the depth resolution of measurements by use of phase-shifting algorithms can be significantly improved compared with the application of a Ronchi grating or a nematic liquid-crystal display.
Journal ArticleDOI
Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics.
TL;DR: A new method of calibration and adjustment using a silica micro-sphere as a calibration artifact is introduced and a straightforward method to correct for phase and amplitude imperfections in the TF is described using a modified inverse filter.
References
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Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.