Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
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Proceedings ArticleDOI
Vertical scanning white light interfering profilometer based on Linnik interference microscope
TL;DR: In this article, a vertical scanning white light interfering profilometer based on Linnik type interference microscope is developed, in which the coarse position of the vertical scanning system is performed by inclined sliding guides, AC servo motor, ballscrew, and the fine positioning by parallel board flexure hinge and piezoelectric ceramic, respectively.
Proceedings ArticleDOI
3D micro profile measurement with the method of spatial frequency domain analysis
TL;DR: In this paper, a step-like sample was tested twice, with 128 scanning interferograms recorded for each test, and two tests yielded same profile result for the sample, and step heights obtained were 50.88 nm and 50.94 nm.
Journal ArticleDOI
Surface curvature measurement of microlenses using a white-light interference microscope and fast geometric fit algorithm
TL;DR: In this paper, a technique for measuring the microlens radius of curvature (ROC) was proposed based on the principle of 3D surface topography using a white light interference microscope.
Journal ArticleDOI
Compensation for correlated error in multilayer interferometer.
TL;DR: The experimental results show that the 4N-3 algorithm is optimal and possesses the smallest repeatability error, and the characteristic polynomial theory and Fourier representation of the algorithms are optimal.
Proceedings ArticleDOI
Optimised 3D surface measurement of hydroxyapatite layers using adapted white light scanning interferometry
TL;DR: In this article, the authors have grown bio-like hydroxyapatite layers in-vitro on stainless steel, silicon and silica glass by using a biomimetic approach (immersion in a supersaturated aqueous solution resembling the ion composition of human blood plasma).
References
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Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.