Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
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Proceedings ArticleDOI
Improved micro topography measurement by LCoS-based fringe projection and z-stitching
TL;DR: A new z-stitching method where n measurements at different well determined z-positions of the motor stage were performed to get the complete depth map of the entire object, so the depth measurement range is only limited by the mechanics of the z-stage.
Journal ArticleDOI
Investigation of a dual-layer structure using vertical scanning interferometry
C.J. Tay,Chenggen Quan,M. Li +2 more
TL;DR: In this article, a method based on white light vertical scanning interferometry (VSI) is proposed to investigate a dual-layer structure and the thickness of each layer is obtained.
Journal ArticleDOI
Discontinuous surface measurement by wavelength-tuning interferometry with the excess fraction method correcting scanning nonlinearity.
Kenichi Hibino,Yosuke Tani,Youichi Bitou,Toshiyuki Takatsuji,Shin'ichi Warisawa,Mamoru Mitsuishi +5 more
TL;DR: The excess fraction method with a piezoelectric transducer phase shifting is applied to two-dimensional surface shape measurements and demonstrates that the determination of absolute interference order gives the profile of a surface with a step height with an accuracy of 12 nm.
Proceedings ArticleDOI
Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method
TL;DR: In this article, a boundary elements method is used as a rigorous scattering model to calculate the scattered field at a distant boundary, and the CSI signal is calculated by considering the image formation as back-propagation of the scattering field, combined with the reflected reference field.
Journal ArticleDOI
Imaging thin and ultrathin organic films by scanning white light interferometry
TL;DR: In this article, the authors present the results of a feasibility study of the capabilities of scanning white light interferometry (SWLI) to map large (macroscopic) areas of thin and ultrathin organic films deposited on mica and borosilicate glass substrates.
References
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Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.