Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
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Journal ArticleDOI
Optical thickness measurement of mask blank glass plate by the excess fraction method using a wavelength-tuning interferometer
TL;DR: In this article, the optical thickness of a 140mm2 mask blank glass plate was measured by three-surface interferometry using a wavelength-tuning Fizeau interferometer.
Proceedings ArticleDOI
Analysis of spectrally resolved white light interferometry by Hilbert transform method
TL;DR: In this article, the Hilbert Transform method was used to determine the phase of a white light interferogram in SRWLI using only one spectrally resolved white-light interfogram.
Proceedings ArticleDOI
Applications of a White Light Interferometer for Wear Measurement of Cylinders
TL;DR: In this article, a Michelson-like white light interferometer was used to measure cylinders and cylindrical part alignment, and a mathematical model was developed to fit the measured cloud of points to the experimental data.
Patent
Interferometric measuring device for form measurement
Michael Lindner,Pawel Drabarek +1 more
TL;DR: In this article, an interferometric measuring device for the form measurement, especially of rough surfaces of a measurement object (O), is presented. But the measurement device is not provided with a superimposition element on which the measuring beam coming from the measurement object and the reference plane (RSP) are caused to interfere.
Proceedings ArticleDOI
Effect of LED spectral shift on vertical resolution in stroboscopic white light interferometry
Kalle Hanhijärvi,J. Aaltonen,Ivan Kassamakov,Kestutis Grigoras,Lauri Sainiemi,Sami Franssila,Edward Hæggström +6 more
TL;DR: In this paper, the spectrum of a PC white light LED was measured using Czerny-Turner-type monochromator (Jobin Yvon H 25) with an optical power meter (Ando AQ-1125).
References
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Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.