Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
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Proceedings ArticleDOI
The development of thin film metrology by coherence scanning interferometry
TL;DR: In this paper, the authors focus on recent developments of CSI using the Helical Complex Field (HCF) function that have extended its use for important thin film measurements, enabling CSI to perform thin film thickness measurements, to measure the surface profile and the interfacial surface roughness of a buried interface and to derive optical constants (index of refraction n and extinction coefficient K).
Dissertation
Hyperspectral interferometry for single-shot profilometry and depth-resolved displacement field measurement
TL;DR: In this paper, a white light interferometer and a hyperspectral imaging system is used for the measurement of optical path differences in a single-shot fashion. But the results did not show the expected linear phase variation with depth.
Sampling theorem for surface profiling by white-light interferometry
英光 小川,Hidemitsu Ogawa +1 more
TL;DR: In this paper, a generalized sampling theorem for white-light interferometry is proposed to reconstruct a square envelope function of an interference fringe directly from sampled values of the interference fringe, not from those of the square envelope functions itself.
Journal ArticleDOI
Thickness profiling of transparent plate using wavelength-tuned phase-shifting analysis
TL;DR: In this paper, a 13-frame phase extraction algorithm that can suppress the uniform phase error was derived using a Fourier description and numerical error analysis, with comparisons to de Groot 13, Hibino 19, Hanayama 11, and 17-frame algorithms.
Journal ArticleDOI
Precision interferometric surface metrology of transparent thin film using wavelength tuning
TL;DR: In this article, the surface topography of an ITO thin film on the surface of a supporting plate was measured by wavelength tuned phase shifting interferometer and polynomial window function.
References
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Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.