Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
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Journal ArticleDOI
A novel phase retrieval method from three-wavelength in-line phase-shifting interferograms based on positive negative 2π phase shifts
TL;DR: In this article, a new method to extract quantitative phases for each wavelength from three-wavelength in-line phase-shifting interferograms is proposed, and the surface morphology with increased ambiguity-free range at synthetic beat wavelength can be obtained, while maintaining the low noise precision of the single wavelength measurement, by combining this method with threewavelength phase unwrapping method.
Journal ArticleDOI
Stroboscopic White Light Interferometry for Dynamic Characterization of Capacitive Pressure Sensors
Ivan Kassamakov,Kalle Hanhijärvi,J. Aaltonen,Lauri Sainiemi,Kestutis Grigoras,Sami Franssila,Anu Kärkkäinen,Edward Hæggström +7 more
TL;DR: In this article, a two-channel function generator is used to drive the sample and the stroboscopic illumination synchronized to an arbitrary phase angle of the sample oscillation, and a single color LED is used as the light source.
Journal ArticleDOI
Quantitative phase imaging using four interferograms with special phase shifts by dual-wavelength in-line phase-shifting interferometry
TL;DR: In this article, a new approach of quantitative phase imaging using four interferograms with special phase shifts in dual-wavelength in-line phase-shifting interferometry is presented.
Journal ArticleDOI
Statistical and interferometric determination of the optical thickness of a multilayer transparent plate
Yangjin Kim,Kenichi Hibino +1 more
TL;DR: In this article, a 15-sample phase shifting algorithm was proposed to compensate for the phase shift miscalibration and up-to-first-order nonlinearity of the coupling errors between the second-order harmonic and phase-shift errors.
Proceedings ArticleDOI
Low-coherence tandem interferometer for remote calibration of gauge blocks
Akiko Hirai,Hirokazu Matsumoto +1 more
TL;DR: In this paper, a low-coherence tandem interferometer with a single-mode optical fiber is developed for remote measurement of length, where the optical path difference provided in the first lowcoherence interferer is transmitted through the optical fiber to the second low-Coherence inter-ferometer.
References
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Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.