Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
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Journal ArticleDOI
Accuracy Improvement and Systematic Bias Analysis of Scanning White Light Interferometry for Free-form Surfaces Measurements
TL;DR: In this paper, a modified version of white-light interferometry was proposed to eliminate the measurement errors and improve the accuracy of WLI. The authors also reported systematic errors caused by optical aberrations when the object is not flat.
Dissertation
Enhancing the Capability of White Light Interferometry on Complex Surfaces
TL;DR: In this paper, it was found that a significant amount of distortion occurs when the test part is near the optical axis of the light beam path for the white light interferometer.
Journal ArticleDOI
Mach-Zehnder interferometry investigations in drying of water-saturated porous materials
TL;DR: In this paper, a white-light Mach-Zehnder interferometer has been used to measure the concentration gradients in the test cell, which occur as a result of the drying process.
Proceedings ArticleDOI
Assessment of technology and (thermo)mechanical behaviour of MEMS devices by interference microscopy (Invited Paper)
TL;DR: In this paper, the capabilities of interference microscopy techniques for microelectromechanical systems (MEMS) applications are reviewed, and various examples taken during the development of MEMS fabrication and packaging processes, and results of measurements as function of temperature or under vacuum.
Journal ArticleDOI
A contact and non-contact hybrid profilometer with large range
TL;DR: In this article, a hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring techniques.
References
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Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.