Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
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Proceedings ArticleDOI
Multi-purpose optical profiler for characterization of materials, film stacks and for absolute topography measurement
X. Colonna de Lega,Martin F. Fay,Peter J. de Groot,Boris Kamenev,J. Ryan Kruse,Mitch Haller,Mark Davidson,Lena Miloslavsky,Duncan Mills +8 more
TL;DR: In this article, a scanning white-light interference microscope that offers two complementary modes of operation on a common metrology platform is presented. The first mode measures the topography and the second one measures the complex reflectivity of an object surface over a range of wavelengths, angles of incidence and polarization states.
Dissertation
Development of a traceability route for areal surface texture measurements
TL;DR: In this article, a primary in-strument, methodologies for using the primary instrument to calibrate material measurement standards used as standard transfer artefacts, and the process of transferring this traceability to industrial users of stylus and optical instruments is presented.
Determination of the lateral resolution of an interference microscope using a micro-scale sphere
TL;DR: In this article, the lateral resolution of an interference microscope using a micro-scale sphere was determined by using a single-dimensional (SDF) micro-sphere model of the interference microscope.
Journal ArticleDOI
Rundheitsmessungen mit einem Diodenlaserinterferometer (Roundness Measurements with a Diode Laser Interferometer)
TL;DR: In this article, a new entwickelten Interferometer and einem kommerziellen Formmessgerät were used for Rundheitsmessungen.
Journal ArticleDOI
The role of surface topography on deformation-induced magnetization under inhomogeneous elastic-plastic deformation
TL;DR: The aim of this study is to discuss the phenomenon of inhomogeneous “self-magnetization” of a polycrystalline ferromagnetic material under inhomogeneity deformation experimentally and with stronger material-mechanical focus.
References
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Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.