Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
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Dissertation
Digitale Analyse periodischer und transienter Messsignale anhand von Beispielen aus der optischen Präzisionsmesstechnik
TL;DR: In this paper, a 3D-Analyse von Oberflachenschadigungen in metallischen Werkstoffen unter Ermudungsbelastung is presented.
Journal ArticleDOI
In situ non-destructive measurement of biofilm thickness and topology in an interferometric optical microscope.
TL;DR: Using white light interferometry, surface morphology, surface roughness, and biofilm thickness were measured over time without while the biofilm continued to grow and followed expected trends for bacterial growth.
Journal ArticleDOI
Valve cone measurement using white light interference microscopy in a spherical measurement geometry
TL;DR: In this paper, an interference microscope for valve cone angle, roundness, straightness, and waviness using scanning white light interferometry is described, where a radial scan locates intersections of the measurement surface with respect to the datum point, and software reconstructs the conical sample surface by means of a calibrated mapping function.
Proceedings ArticleDOI
White-light interferometry with reference signal
TL;DR: In this paper, the authors describe a white light interferometer with a long coherence length source that provides an interferometric reference signal that is used to monitor the motion of the scanner during each measurement in real time.
Proceedings ArticleDOI
Measurement errors of mirrorlike, tilted objects in white-light interferometry
TL;DR: In this paper, the authors examined a Mirau type white-light interferometer with chromatic aberrations and explained how mirrorlike, tilted objects cause a correlation of the phase and the height information in each interference signal.
References
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Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.