Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
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Proceedings ArticleDOI
A high-speed and high-precision phase-shift demodulation algorithm for optical fiber sensing system based on low-coherence interference
Shaohua Wang,Junfeng Jiang,Tiegen Liu,Kun Liu,Jinde Yin,Meng Xiange,Shuang Wang,Qin Zunqi,Yimo Zhang +8 more
TL;DR: In this paper, a demodulation algorithm, comprising of a calibration algorithm and an improved linear fitting phase-shift algorithm, is proposed for optical fiber sensing system based on low-coherence interference.
Proceedings ArticleDOI
Interferometry with respect to topological phases
TL;DR: In this article, the concept of interferometry for micro-surface monitoring in real-time has been elaborated, that considers separately the phases: dynamical, Fresnel and topological.
Proceedings ArticleDOI
Use of monochromatic phase data for improved profile measurement in spectrally resolved white light interferometry
TL;DR: In this paper, the optical path difference (OPD) is calculated as the slope of the phase versus wave number linear fit, which can be used to obtain a surface profile.
Journal ArticleDOI
Ereignisbasierte Weißlichtinterferometrie (eCSI)
TL;DR: In this paper , a scannendes, ereignisbasiertes Weißlichtinterferometriemesssystem (eCSI) in Verbindung with the Nanomess-and Positioniermaschine NPMM-200 vorgestellt.
Proceedings ArticleDOI
Fast Detection of Single Sided Diffracted Defects in Display Glass
TL;DR: In this paper, a fast noninterferometric system for measurement of diffraction patterns based on the incidence of partially coherent light in display glass is assembled, which provides an acceptable qualitative measurement for the detection of asymmetric defects.
References
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Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.