Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
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TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
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Proceedings ArticleDOI
Uncertainty of height information in coherence scanning interferometry
TL;DR: In this paper, the authors describe the properties of the correlogram in the spatial and in the frequency domain, and the uncertainty of height information is discussed for both,============the frequency domain analyse (FDA) proposed by de Groot and the Hilbert transform.
Journal ArticleDOI
Remote calibration of end standards using a low-coherence tandem interferometer with an optical fiber
Akiko Hirai,Hirokazu Matsumoto +1 more
TL;DR: In this paper, the authors used a low-coherence tandem interferometer and a single-mode optical fiber for remote measurement of length up to 10 mm with a standard deviation of 1.4 μm.
Journal ArticleDOI
Single Shot White Light Interference Microscopy for 3D Surface Profilometry Using Single Chip Color Camera
TL;DR: In this paper, a single shot low coherence white light Hilbert phase microscopy (WL-HPM) was presented for quantitative phase imaging of Si opto-electronic devices, i.e., Si integrated circuits (Si-ICs) and Si solar cells.
Journal ArticleDOI
Microelectromechanical systems surface characterization based on white light phase shifting interferometry
TL;DR: In this article, a peak detecting algorithm combined with white light interferometry was proposed to carry the fast, accurate, and noncontact measurements, where the centroid method was adopted to concentrate the phase extraction on the zero-order fringe, which not only decreases the phase error, but also frees the data processing from the phase unwrapping procedure.
Proceedings ArticleDOI
Depth sensitive Fourier-Scatterometry for the characterization of sub-100 nm periodic structures
V. Ferreras Paz,Sandy Peterhänsel,Ka. Frenner,Wolfgang Osten,Aleksandr Ovsianikov,Kotaro Obata,Boris N. Chichkov +6 more
TL;DR: In this article, a simulation-based sensitivity comparison of Fourier-Scatterometry at one fixed wavelength, using a white light light source and also additionally using a reference-branch for white-light-interference has been successfully carried out.
References
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Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.