Journal ArticleDOI
Surface Profiling by Analysis of White-light Interferograms in the Spatial Frequency Domain
Peter J. de Groot,Leslie L. Deck +1 more
Reads0
Chats0
TLDR
In this article, a scanning white-light interferometer for high-precision surface structure analysis is described, where the interferogram for each of the image points in the field of view is generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory.Abstract:
We describe a scanning white-light interferometer for high-precision surface structure analysis. Interferograms for each of the image points in the field of view of the instrument are generated simultaneously by scanning the object in a direction perpendicular to the object surface, while recording detector data in digital memory. These interferograms are then transformed into the spatial frequency domain and the surface height for each point is obtained by examination of the complex phase as a function of frequency. The final step is the creation of a complete three-dimensional image constructed from the height data and corresponding image plane coordinates. The measurement repeatability is better than 0·5 nm r.m.s. for a surface height range of 100 μm.read more
Citations
More filters
Journal ArticleDOI
Fast surface profiler by white-light interferometry by use of a new algorithm based on sampling theory
TL;DR: A fast surface-profiling algorithm based on white-light interferometry by use of sampling theory that extends the sampling interval to 1.425 microm when an optical filter with a center wavelength of 600 nm and a bandwidth of 60 nm is used.
Patent
Vibration Resistant Interferometry
TL;DR: In this paper, the authors proposed a phase shifting interferometry (PSI) method that temporally transforms at least some of the interference signals into a first frequency domain signal, determining an estimated phase profile of the test object based on the estimated phase profiles, determining phase shifts at multiple scan positions, and then determining a more accurate phase profile.
Journal ArticleDOI
Optical interferometry for measurement of the geometric dimensions of industrial parts
TL;DR: An instrument for the measurement of surface flatness, parallelism, and size (thickness) of plane-parallel parts in a single measurement to 1sigma gauge capability of 0.02, 0.03, and 0.06 microm, believed to be novel.
Journal ArticleDOI
Two-wavelength in-line phase-shifting interferometry based on polarizing separation for accurate surface profiling
D.G. Abdelsalam,Daesuk Kim +1 more
TL;DR: The five- and seven-phase step algorithms have been compared for their effectiveness in reducing the noise in the phase maps and the results are in agreement.
Journal ArticleDOI
Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques
TL;DR: In this article, a comparative study of the temporal phase shifting technique in relation to temporal phase-shifting technique is presented, and a modified method to remove the influence of source spectrum modulation in Hilbert transform procedure is proposed.
References
More filters
Journal ArticleDOI
Optical coherence tomography
David Huang,Eric A. Swanson,Charles P. Lin,Joel S. Schuman,William G. Stinson,Warren Chang,Michael R. Hee,Thomas J. Flotte,Kenton W. Gregory,Carmen A. Puliafito,James G. Fujimoto +10 more
TL;DR: OCT as discussed by the authors uses low-coherence interferometry to produce a two-dimensional image of optical scattering from internal tissue microstructures in a way analogous to ultrasonic pulse-echo imaging.
Book ChapterDOI
Optical Coherence Tomography
Eric A. Swanson,J. Izatt,M. Bee,David Huang,Charles P. Lin,Carmen A. Puliafito,Carmen A. Puliafito,James G. Fujimoto +7 more
TL;DR: Optical coherence tomography (OCT) has developed rapidly since its first realisation in medicine and is currently an emerging technology in the diagnosis of skin disease as mentioned in this paper, where OCT is an interferometric technique that detects reflected and backscattered light from tissue.
Journal ArticleDOI
Digital phase-shifting interferometry: a simple error-compensating phase calculation algorithm.
TL;DR: La difference de phase entre les 2 faisceaux interferant varie de maniere connue et on fait des mesures de the distribution d'intensite a travers la pupille correspondant a au moins 3 dephasages differents.
Journal ArticleDOI
Optical coherence-domain reflectometry: a new optical evaluation technique.
TL;DR: An optical evaluation technique is described that is suitable for determining the positions and magnitudes of reflection sites within miniature optical assemblies using the coherence effects exhibited by a broadband optical source and is referred to as optical coherence-domain reflectometry.
Journal ArticleDOI
Three-dimensional sensing of rough surfaces by coherence radar
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.