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Journal ArticleDOI

A Practical Implementation of Silicon Microchannel Coolers for High Power Chips

TLDR
In this paper, the authors describe a practical implementation of a single-phase Si microchannel cooler designed for cooling very high power chips such as microprocessors, which is able to cool chips with average power densities of 400W/cm2 or more.
Abstract
This paper describes a practical implementation of a single-phase Si microchannel cooler designed for cooling very high power chips such as microprocessors. Through the use of multiple heat exchanger zones and optimized cooler fin designs, a unit thermal resistance 10.5 C-mm2 /W from the cooler surface to the inlet water was demonstrated with a fluid pressure drop of <35kPa. Further, cooling of a thermal test chip with a microchannel cooler bonded to it packaged in a single chip module was also demonstrated for a chip power density greater than 300W/cm2. Coolers of this design should be able to cool chips with average power densities of 400W/cm2 or more

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Citations
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Journal ArticleDOI

A review of liquid flow and heat transfer in microchannels with emphasis to electronic cooling

TL;DR: In this paper, the main focus is the flow and heat transfer regime related to electronic cooling in evolving channel forms, whose fabrication is being enabled by the significant advancement in micro-technologies.
Journal ArticleDOI

A numerical and experimental investigation on microscale heat transfer effect in the combined entry region in macro geometries

TL;DR: In this paper, an insert was placed concentrically into the channel to make the flow path small enough to behave like a microchannel in order to attain high heat removal capabilities.
Journal ArticleDOI

Advanced micro-heat exchangers for high heat flux

TL;DR: In this paper, three micro-heat exchangers for use in a liquid cooling system with a long offset strip, short offset strip and chevron flow path based on the traditional heat transfer enhancement concepts were designed and tested.
Proceedings ArticleDOI

Waste heat recovery in supercomputers and 3D integrated liquid cooled electronics

TL;DR: In this article, the authors show that the superior thermal properties of water make it possible to cool electronic chips and data centers using hot water with inlet temperature up to 60°C.
Proceedings Article

Hotspot-adapted cold plates to maximize system efficiency

TL;DR: In this paper, the potential and limitations of hotspot-adapted liquid heat removal to improve system pumping power and reusability of output heat, for various packaging schemes at the component level, were modeled.
References
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Journal ArticleDOI

High-performance heat sinking for VLSI

TL;DR: In this paper, a water-cooled integral heat sink for silicon integrated circuits has been designed and tested at a power density of 790 W/cm2, with a maximum substrate temperature rise of 71°C above the input water temperature.
Journal ArticleDOI

Challenges, developments and applications of silicon deep reactive ion etching

TL;DR: In this article, an optimized hardware for balanced RF drive at high power levels (3 kW) of the inductive plasma source in combination with spatial ion discrimination and collimation yields etch-rates in excess of 10 µm/min with excellent uniformity of profile and rate distribution.
Proceedings ArticleDOI

Micro-channel heat exchanger optimization

G.M. Harpole, +1 more
TL;DR: In this article, a complete two-dimensional flow/thermal model of the micro-channel cooler was developed, and the design parameters were optimized for the case of a 1 kW/cm/sup 2/ heat flux with the top surface at 25 degrees C.
Proceedings ArticleDOI

Single-Phase Heat Transfer Enhancement Techniques in Microchannel and Minichannel Flows

TL;DR: In this article, the applicability of single-phase heat transfer enhancement techniques for microchannels and minichannels is evaluated, where the major techniques include flow transition, boundary layer, entrance region, vibration, electric fields, swirl flow, secondary flow and mixers.
Journal ArticleDOI

Cooling characteristics of diamond-shaped interrupted cooling fin for high-power LSI devices

T. Kishimoto, +1 more
- 23 Apr 1987 - 
TL;DR: In this paper, a diamond-shaped interrupted microgrooved cooling fin was proposed to decrease the junction temperature variation across the chip, and the analytical results indicated that the reduction in junction temperature was less than 25% compared with a conventional paralles-plate-shaped cooling fin.
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