Recent Progress in Materials Issues for Piezoelectric MEMS
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In this article, the authors give an overview of the field, highlighting recent achievements, introduce operation principles, and describe some applications, including RF filters in mobile phones working on the principle of standing thickness waves in AlN films.Abstract:
Piezoelectric materials play a crucial role in a large number of devices and applications modern society would not like to miss. Mobile phones and ultrasonic imaging are just the most prominent ones. Since two decades, miniaturization of mechanical devices in silicon technology is a major research direction in engineering known under name of MEMS, which stands for micro-electro-mechanical systems. Piezoelectricity fits very well into this concept and was expected right from the beginning to play its role in MEMS. The breakthrough was made with RF filters in mobile phones working on the principle of standing thickness waves in AlN films. What counts here is acoustic quality and stability. The force champion among piezoelectric thin film materials, Pb(Zr,Ti)O3 gave more problems in processing, and requires more patience to meet requirements and needs for a mass applications. It seems, however, that the breakthrough is imminent. This article attempts to give an overview of the field, highlighting recent achievements, introduce operation principles, and describe some applications.read more
Citations
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Journal ArticleDOI
Piezoelectric MEMS sensors: state-of-the-art and perspectives
Srinivas Tadigadapa,Kiron Mateti +1 more
TL;DR: A comprehensive review of micromachined piezoelectric transducers can be found in this paper, where the authors present a critical assessment of the future trends and promise of this technology.
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Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Yong Qing Fu,Yong Qing Fu,Jack Luo,Nam-Trung Nguyen,Anthony J. Walton,Andrew J. Flewitt,Xiaotao Zu,Yifan Li,Glen McHale,Allan Matthews,Enrique Iborra,Hejun Du,William I. Milne,William I. Milne +13 more
TL;DR: In this article, the authors acknowledge support from the Innovative electronic manufacturing research centre (IeMRC) through the EPSRC funded flagship project SMART MICROSYSTEMS.
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Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review
Yong Qing Fu,Yong Qing Fu,Jikui Luo,Jikui Luo,X.Y. Du,Andrew J. Flewitt,Yifan Li,Gerard H. Markx,Anthony J. Walton,William I. Milne +9 more
TL;DR: In this paper, a review of recent developments on the preparation and application of ZnO films for acoustic wave-based microfluidics and biosensors is presented, and the potential to fabricate an integrated lab-on-a-chip diagnostic system based on these ZnOs acoustic wave technologies is discussed.
Journal ArticleDOI
Strong piezoelectricity in bioinspired peptide nanotubes.
TL;DR: Anomalously strong shear piezoelectric activity in self-assembled diphenylalanine peptide nanotubes (PNTs) is shown, indicating electric polarization directed along the tube axis, opening up a wide avenue for developing new generations of "green" piezOElectric materials and piezonanodevices based on bioactive tubular nanostructures potentially compatible with human tissue.
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Origins of Electro-Mechanical Coupling in Polycrystalline Ferroelectrics During Subcoercive Electrical Loading
Abhijit Pramanick,Abhijit Pramanick,Dragan Damjanovic,John E. Daniels,John E. Daniels,Juan C. Nino,Jacob L. Jones +6 more
TL;DR: In this paper, results from in situ, high-energy, and time-resolved X-ray diffraction experiments are interpreted together with macroscopic piezoelectric coefficient measurements in order to better understand the contribution of these mechanisms to the electromechanical coupling of polycrystalline ferroelectric materials.
References
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Book
Physical properties of crystals
TL;DR: In this paper, the physical properties of crystals systematically in tensor notation are presented, presenting tensor properties in terms of their common mathematical basis and the thermodynamic relations between them.
Journal ArticleDOI
The Physics of Ferroelectric Memories
TL;DR: In this article, the authors describe a scenario where they are in the last stages of typing their thesis, the year is 1980, and it's a hot, hazy summer afternoon, a thunderstorm brews on the horizon.
Journal ArticleDOI
Direct piezoelectric coupling to surface elastic waves
Richard M. White,F. W. Voltmer +1 more
Journal ArticleDOI
Ferroelectric thin films for micro-sensors and actuators: a review
TL;DR: In this article, the authors present a review of the deposition, integration, and device fabrication of ferroelectric PbZrxTi1-xO3 (PZT) films for applications in microelectromechanical systems.