Showing papers on "Silicon dioxide published in 2008"

Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides.

Abstract: We introduce and present experimental evaluations of loss and nonlinear optical response in a waveguide and an optical resonator, both implemented with a silicon nitride/ silicon dioxide material platform prepared by plasma-enhanced chemical vapor deposition with dual frequency reactors that significantly reduce the stress and the consequent loss of the devices. We measure a relatively small loss of approximately 4dB/cm in the waveguides. The fabricated ring resonators in add-drop and all-pass arrangements demonstrate quality factors of Q=12,900 and 35,600. The resonators are used to measure both the thermal and ultrafast Kerr nonlinearities. The measured thermal nonlinearity is larger than expected, which is attributed to slower heat dissipation in the plasma-deposited silicon dioxide film. The n2 for silicon nitride that is unknown in the literature is measured, for the first time, as 2.4 x 10(-15)cm(2)/W, which is 10 times larger than that for silicon dioxide.

Hollow silica nanocontainers as drug delivery vehicles.

Abstract: Novel hollow silica nanoparticles (HSNPs) for drug delivery vehicles were synthesized using silica-coated magnetic assemblies, which are composed of a number of Fe(3)O(4) nanocrystals, as templates. The core cavity was obtained by removal of Fe(3)O(4) phase with hydrochloric acid and subsequent calcination at a high temperature. HSNPs were modified by amine in order to introduce positive surface charge and further PEGylated for increased solubility in aqueous medium. Doxorubicin as a model drug was loaded into the HSNPs, and notable sustained drug release from HSNPs was demonstrated.

Silicon Dioxide Thin Films by ALD

Abstract: Methods are provided for depositing silicon dioxide containing thin films on a substrate by atomic layer deposition ALD. By using disilane compounds as the silicon source, good deposition rates and uniformity are obtained.

Silica−Void−Gold Nanoparticles: Temporally Stable Surface-Enhanced Raman Scattering Substrates

Abstract: Reproducible detection of a target molecule is demonstrated using temporally stable solution-phase silica-void-gold nanoparticles and surface-enhanced Raman scattering (SERS). These composite nanostructures are homogeneous (diameter = 45 +/- 4 nm) and entrap single 13 nm gold nanoparticle cores inside porous silica membranes which prevent electromagnetic coupling and aggregation between adjacent nanoparticles. The optical properties of the gold nanoparticle cores and structural changes of the composite nanostructures are characterized using extinction spectroscopy and transmission electron microscopy, respectively, and both techniques are used to monitor the formation of the silica membrane. The resulting nanostructures exhibit temporally stable optical properties in the presence of salt and 2-naphthalenethiol. Similar SERS spectral features are observed when 2-naphthalenethiol is incubated with both bare and membrane-encapsulated gold nanoparticles. Disappearance of the S-H Raman vibrational band centered at 2566 cm(-1) with the composite nanoparticles indicates that the target molecule is binding directly to the metal surface. Furthermore, these nanostructures exhibit reproducible SERS signals for at least a 2 h period. This first demonstration of utilizing solution-phase silica-void-gold nanoparticles as reproducible SERS substrates will allow for future fundamental studies in understanding the mechanisms of SERS using solution-phase nanostructures as well as for applications that involve the direct and reproducible detection of biological and environmental molecules.

Oxidation-triggered release of fluorescent molecules or drugs from mesoporous Si microparticles.

Abstract: The fluorescent dye Alexa Fluor 488 or the anticancer drug doxorubicin is attached to the surface and inner pore walls of mesoporous Si particles by covalent attachment, and the oxidation-induced release of each molecule is studied. The molecules are bound to the Si matrix using a 10-undecenoic acid linker, which is attached by thermal hydrosilylation. Loading capacity of the microparticles using this method is approximately 0.5 and 45 mg/g of porous Si microparticle for Alexa Fluor 488 and doxorubicin, respectively. The Si-C-bound assembly is initially stable in aqueous solution, although oxidation of the underlying Si matrix results in conversion to silicon oxide and slow release of the linker-molecule complex by hydrolysis of the Si-O attachment points. When the attached molecule is a fluorophore (Alexa Fluor 488 or doxorubicin), its fluorescence is effectively quenched by the semiconducting silicon matrix. As the particle oxidizes in water, the fluorescence intensity of the attached dye increases due to growth of the insulating silicon oxide layer and, ultimately, dye release from the surface. The recovery of fluorescence in the microparticle and the release of the molecule into solution are monitored in real-time by fluorescence microscopy. Both processes are accelerated by introduction of the oxidizing species peroxynitrite to the aqueous solution. The oxidation-triggered release of the anticancer drug doxorubicin to HeLa cells is demonstrated.

A practical, self-catalytic, atomic layer deposition of silicon dioxide.

Abstract: The outstanding chemical, electrical, and optical properties of silicon dioxide have made it ubiquitous in science and technology. The ability to create SiO2 nanostructures of well-defined geometry would broaden its range of applications even further, in particular in the chemical, electrokinetic, and biomedical realms. Atomic layer deposition (ALD) is especially suited to nanostructuring, since its kinetics are controlled by surface chemistry rather than mass transport from the gas phase. However, reports on the ALD of silica are few and far between in the open literature to date. All published reactions suffer from some weakness: a corrosive by-product or catalyst, poor reproducibility, or impurities in the deposited film. Herein, we describe a practical ALD process for SiO2 that overcomes such limitations. Based on the NH3-catalyzed hydrolysis of tetraethoxysilane (Si(OEt)4), chemical intuition dictates that a triethoxysilane bearing an aminoalkyl moiety be readily hydrolyzed without any extraneous catalyst. The basic functionality will labilize the strong Si!O bonds, a phenomenon that can be called “self-catalysis” to emphasize the fact that one chemical species is both substrate and catalyst. Subsequent oxidative cleavage of the tethered moiety should afford a silanol, amenable to further reaction with aminoalkyltriethoxysilane molecules. Accordingly, a three-step reaction sequence based on 3-aminopropyltriethoxysilane, water, and ozone (O3) can be envisioned for the ALD of SiO2 (Scheme 1).

High lifetime consumable silicon nitride-silicon dioxide plasma processing components

Abstract: A method of increasing mean time between cleans of a plasma etch chamber and chamber parts lifetimes is provided. Semiconductor substrates are plasma etched in the chamber while using at least one sintered silicon nitride component exposed to ion bombardment and/or ionized halogen gas. The sintered silicon nitride component includes high purity silicon nitride and a sintering aid consisting of silicon dioxide. A plasma processing chamber is provided including the sintered silicon nitride component. A method of reducing metallic contamination on the surface of a silicon substrate during plasma processing is provided with a plasma processing apparatus including one or more sintered silicon nitride components. A method of manufacturing a component exposed to ion bombardment and/or plasma erosion in a plasma etch chamber, comprising shaping a powder composition consisting of high purity silicon nitride and silicon dioxide and densifying the shaped component.

Adsorption of formaldehyde vapor by amine-functionalized mesoporous silica materials

Abstract: The amine-functionalized mesoporous silica materials were prepared via the co-condensation reaction of tetraethoxysilane and three types of organoalkoxysilanes: 3-aminopropyl-trimethoxysilane, n-(2-aminoethyl)-3-aminopropyltrimethoxysilane, and 3-(2-(2-aminoehtylamino)ethylamino) propyl-trimethoxysilane. Cetyltrimethylammonium bromide was used as a template for forming pores. Specific surface area and pore volume of the amine-functionalized mesoporous silica materials were determined using surface area and pore size analyzer. Fourier transform infrared (FTIR) spectroscope was employed for identifying the functional groups on pore surface. In addition, the amine-functionalized mesoporous silica materials were applied as adsorbents for adsorbing formaldehyde vapor. FTIR spectra showed the evidence of the reaction between formaldehyde molecules and amine groups on pore surface of adsorbents. The equilibrium data of formaldehyde adsorbed on the adsorbents were analyzed using the Langmuir, Freundlich and Temkin isotherm. The sample functionalized from n-(2-aminoethyl)-3-aminopropyltrimethoxysilane showed the highest adsorption capacity owing to its amine groups and the large pore diameter.

Deposition kinetics of bacteriophage MS2 on a silica surface coated with natural organic matter in a radial stagnation point flow cell.

Abstract: A quartz crystal microbalance (QCM) coupled with a radial stagnation point flow (RSPF) cell was used to study deposition kinetics of bacteriophage MS2 on silica surface coated with Suwannee River natural organic matter (SRNOM). Three stocks of MS2 stored in 1 mM NaHCO3, deionized (DI) water or phosphate buffer saline (PBS) solution were studied. MS2 stored in PBS solution were found to aggregate at all studied ionic strengths from 3 mM to 200 mM, while MS2 stored in DI water and bicarbonate solutions remained monodispersed. Isoelectric points of MS2 storedin PBS solution were lower than for those stored in DI water and 1 mM NaHCO3 solution. Nonrepulsive deposition rates of MS2 on silica surface coated with poly-L-lysine (PLL) were independent of ionic strength. In contrast MS2 deposition rates on bare silica surface or silica surface coated with SRNOM increased gradually and stabilized at an ionic strength of 60 mM. MS2 deposition rates on bare silica surface were higher than those on silica surface coated with SRNOM at low ionic strengths. Deposition rates on these two surfaces were similar at high ionic strengths. Experimental data suggest that electrostatic and steric interactions were the two main deposition mechanisms of MS2 on either bare silica or silica surface coated with SRNOM.

Nitric acid pretreatment for the passivation of boron emitters for n-type base silicon solar cells

Abstract: We have developed a simple method to passivate industrially produced boron-doped emitters for n-type base silicon solar cells using an ultrathin (∼1.5nm) silicon dioxide layer between the silicon emitter and the silicon nitride antireflection coating film. This ultrathin oxide is grown at room temperature by soaking the silicon wafers in a solution of nitric acid prior to the deposition of the silicon nitride antireflection coating film. The n-type solar cells processed in such a way demonstrate a conversion efficiency enhancement of more than 2% absolute over the solar cells passivated without the silicon dioxide layer.

Electrostatic self-assembly of PEG copolymers onto porous silica nanoparticles.

Abstract: A critical requirement toward the clinical use of nanocarriers in drug delivery applications is the development of optimal biointerfacial engineering procedures designed to resist biologically nonspecific adsorption events. Minimization of opsonization increases blood residence time and improves the ability to target solid tumors. We report the electrostatic self-assembly of polyethyleneimine-polyethylene glycol (PEI-PEG) copolymers onto porous silica nanoparticles. PEI-PEG copolymers were synthesized and their adsorption by self-assembly onto silica surfaces were investigated to achieve a better understanding of structure-activity relationships. Quartz-crystal microbalance (QCM) study confirmed the rapid and stable adsorption of the copolymers onto silica-coated QCM sensors driven by strong electrostatic interactions. XPS and FT-IR spectroscopy were used to analyze the coated surfaces, which indicated the presence of dense PEG layers on the silica nanoparticles. Dynamic light scattering was used to optimize the coating procedure. Monodisperse dispersions of the PEGylated nanoparticles were obtained in high yields and the thin PEG layers provided excellent colloidal stability. In vitro protein adsorption tests using 5% serum demonstrated the ability of the self-assembled copolymer layers to resist biologically nonspecific fouling and to prevent aggregation of the nanoparticles in physiological environments. These results demonstrate that the electrostatic self-assembly of PEG copolymers onto silica nanoparticles used as drug nanocarriers is a robust and efficient procedure, providing excellent control of their biointerfacial properties.

On the origin of the fast photoluminescence band in small silicon nanoparticles

Abstract: Colloidal suspensions of small silicon nanoparticles (diameter around 2nm) with fast and efficient ultraviolet-blue photoluminescence (PL) band are fabricated by enhanced electrochemical etching of Si wafers. The detailed study of photoluminescence excitation spectra in a wide range of excitation photon energies (270-420nm) reveals specific behavior of the Stokes shift of the fast PL band that agrees well with theoretical calculation of optical transitions in small silicon nanocrystals and is distinct from emission of silicon dioxide defects.

Hydrophilic low-temperature direct wafer bonding

Abstract: The sealing mechanism of silicon bonding interfaces is reported as a function of annealing temperature. Details of the structural and chemical interface evolution are obtained for hydrophilic silicon/silicon and silicon/silicon dioxide wafer bonding, using x-ray reflectivity and infrared spectroscopy. A two-step mechanism is demonstrated: first a partial sealing of the interface driven by cross-wafer silanol bond condensation and second a water evacuation via oxide formation at the silicon oxide interface.

The phagocytosis of crystalline silica particles by macrophages.

Abstract: Silicosis is a chronic lung disease induced by the inhalation of crystalline silica. Exposure of cultured macrophages to crystalline silica leads to cell death; however, the mechanism of cell-particle interaction, the fate of particles, and the cause of death are unknown. Time-lapse imaging shows that mouse macrophages avidly bind particles that settle onto the cell surface and that cells also extend protrusions to capture distant particles. Using confocal optical sectioning, silica particles were shown to be present within the cytoplasmic volume of live cells. In addition, electron microscopy and elemental analysis showed silica in internal cellular sections. To further examine the phagocytosis process, the kinetics of particle uptake was quantified using an assay in which cells were exposed to ovalbumin (OVA)-coated particles, and an anti-OVA antibody was used to distinguish surface-bound from internalized particles. Fc receptor-mediated uptake of antibody-coated silica particles was nearly complete within 5 minutes. In contrast, no OVA-coated particles were internalized at this time. After 30 minutes, 30% of bound silica was internalized and uptake continued slowly thereafter. OVA-coated latex beads, regardless of surface charge, were internalized at a similarly slow rate. These results demonstrate that macrophages internalize silica and that nonopsonized phagocytosis occurs by a temporally, and possibly mechanistically, distinct pathway from Fc receptor-mediated phagocytosis. Eighty percent of macrophages die within 12 hours of silica exposure. Neither OVA coating nor tetramethylrhodamine isothiocyanate labeling has any effect on cell death. Interestingly, antibody coating dramatically reduces silica toxicity. We hypothesize that the route of particle entry and subsequent phagosome trafficking affects the toxicity of internalized particles.

Effects of boron doping on the structural and optical properties of silicon nanocrystals in a silicon dioxide matrix.

Abstract: Doping of Si nanocrystals is an important topic in the emerging field of Si nanocrystals based all-Si tandem solar cells. Boron-doped Si nanocrystals embedded in a silicon dioxide matrix were realized by a co-sputtering process, followed by high temperature annealing. The x-ray photoelectron spectroscopy B 1s signal attributable to Si–B (187 eV) and/or B–B (188 eV) indicates that the boron may exist inside Si nanocrystals. A higher probability of effective boron doping was suggested for Si-rich oxide films with a low oxygen content, Then, structural and optical properties were characterized with a focus on the effects of the boron content on Si quantum dots. The results show that as the boron content increases, the nanocrystal size is slightly reduced and the Si crystallization is suppressed. The photoluminescence intensity of the films is decreased as the boron content increases. This is due to boron-induced defects and/or Auger processes induced by effective doping. These results can provide optimal conditions for future Si quantum dot based solar cells.

Synthesis of highly monodisperse particles composed of a magnetic core and fluorescent shell.

Abstract: Highly monodisperse particles composed of a magnetic silica core and fluorescent polymer shell were synthesized with a combined technique of heterocoagulation and soap-free emulsion polymerization. Prior to heterocoagulation, monodisperse, submicrometer-sized silica particles were prepared with the Stober method, and magnetic nanoparticles were prepared with a modified Massart method in which a cationic silane coupling agent of N-trimethoxysilylpropyl- N, N, N-trimethylammonium chloride was added just after coprecipitation of Fe (2+) and Fe (3+). The silica particles with negative surface potential were heterocoagulated with the magnetic nanoparticles with positive surface potential. The magnetic silica particles obtained with the heterocoagulation were treated with sodium silicate to modify their surfaces with silica. In the formation of a fluorescent polymer shell onto the silica-coated magnetic silica cores, an amphoteric initiator of 2,2'-azobis[ N-(2-carboxyethyl)-2-2-methylpropionamidine] (VA-057) was used to control the colloidal stability of the magnetic cores during the polymer coating. The polymerization of St in the presence of a hydrophobic fluorophore of pyrene could coat the cores with fluorescent polymer shells, resulting in monodisperse particles with a magnetic silica core and fluorescent polymer shell. Measurements of zeta potential for the composite particles in different pH values indicated that the composite particles had an amphoteric property originating from VA-057 initiator.

Immobilization of the Enzyme Glucose Oxidase on Both Bulk and Porous SiO2 Surfaces

Abstract: Silicon dioxide surfaces, both bulk and porous, were used to anchor the enzyme glucose oxidase. The immobilization protocol was optimized and the samples characterized using X-ray Photoelectron Spectroscopy, Energy Dispersive X-rays coupled to scanning electron microscopy and enzymatic activity measurements. We show that a uniform layer was obtained by activating the oxide before immobilization. X-ray Photoelectron Spectroscopy measurements carried out on bulk oxide showed that the silicon substrate signal was fully screened after the enzyme deposition showing the absence of uncovered surface regions. The enzyme presence was detected monitoring both the C 1s and N 1s signals. Finally, enzymatic activity measurements confirmed that the glucose oxidase activity was preserved after immobilization and maintained after three months of shelf life if the sample was properly stored. The importance of using porous silicon oxide to maximize the surface area was also evidenced.

Dynamics of molecular diffusion of rhodamine 6G in silica nanochannels

Abstract: We describe a method to study diffusion of rhodamine 6G dye in single silica nanochannels using arrays of silica nanochannels. Dynamics of the molecules inside single nanochannel is found from the change of the dye concentration in solution with time. A 10(8) decrease in the dye diffusion coefficient relative to water was observed. In comparison to single fluorescent molecule studies, the presented method does not require fluorescence of the diffusing molecules.

Electroformation of giant phospholipid vesicles on a silicon substrate: advantages of controllable surface properties.

Abstract: We introduce the use of silicon (Si) as a substrate for the electroformation of giant phospholipid vesicles. By taking advantage of the tunability of silicon surface properties, we varied the organization of the phospholipid film on the electrode and studied the consequences on vesicle formation. In particular, we investigated the effects of Si surface chemistry and microtopology on the organization of the phospholipid film and the properties of the final vesicles. We established correlations between chemical homogeneity, film defects, and resulting vesicle size distribution. By considering phospholipid films that are artificially fragmented by electrode microstructures, we showed that the characteristic size of vesicles decreases with a decrease in microstructure dimensions. We finally proposed a way to control the vesicle size distribution by using a micropatterned silicon dioxide layer on a Si substrate.