R
Robert M. Wallace
Researcher at University of Texas at Dallas
Publications - 503
Citations - 41237
Robert M. Wallace is an academic researcher from University of Texas at Dallas. The author has contributed to research in topics: X-ray photoelectron spectroscopy & Atomic layer deposition. The author has an hindex of 84, co-authored 499 publications receiving 37236 citations. Previous affiliations of Robert M. Wallace include Texas Instruments & University of Texas System.
Papers
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Journal ArticleDOI
(Invited) In Situ XPS Study on ALD (Atomic Layer Deposition) of High-k Dielectrics: La2O3 Using La-Formidinate and Ozone
Proceedings ArticleDOI
Contact resistance reduction to FinFET source/drain using dielectric dipole mitigated Schottky barrier height tuning
B. E. Coss,Casey Smith,Wei-Yip Loh,K. J. Chung,Prashant Majhi,Robert M. Wallace,Jiyoung Kim,R. Jammy +7 more
TL;DR: In this article, the authors demonstrate contact resistance reduction using dielectric dipole mitigated Schottky barrier height (SBH) tuning on a FinFET source/drain.
Journal ArticleDOI
9.4: Residual Gas Effects on the Emission Characteristics of Active Mo Field Emission Cathode Arrays
TL;DR: In this paper, experimental measurements on the effects of oxygen, water, carbon dioxide, methane, hydrogen and helium gases on the emission characteristics of active molybdenum field emission cathode arrays are presented.
Journal ArticleDOI
Proton trapping and diffusion in SiO2 thin films : a first-principles study
TL;DR: In this paper, a 73-atom cluster model is used to simulate the Si/SiO 2 interface that is constructed from β-cristobalite SiO 2 on the Si(0, 0, 1) surface.
Journal ArticleDOI
High-k Oxide Growth on III-V Surfaces: Chemical Bonding and MOSFET Performance
Christopher L. Hinkle,Barry Brennan,Stephen McDonnell,M. Milojevic,A. M. Sonnet,D. M. Zhernokletov,Rohit Galatage,Eric M. Vogel,Robert M. Wallace +8 more
TL;DR: In this paper, the chemical bonding of ALD deposited high-k oxides on various III-V semiconductors with multiple surface chemical treatments via in-situ, x-ray photoelectron spectroscopy (XPS) was investigated.