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Physical and structural properties of ZnO sputtered films
Walter Water,Sheng-Yuan Chu +1 more
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In this paper, poly-crystal zinc oxide (ZnO) films with c-axis (002) orientation have been successfully grown on the silicon substrate by r.f. magnetron sputtering technique.About:
This article is published in Materials Letters.The article was published on 2002-07-01. It has received 198 citations till now. The article focuses on the topics: Sputter deposition & Surface roughness.read more
Citations
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A comprehensive review of zno materials and devices
Ümit Özgür,Ya. I. Alivov,C. Liu,A. Teke,Michael A. Reshchikov,Seydi Doğan,Vitaliy Avrutin,Sang-Jun Cho,Hadis Morkoç +8 more
TL;DR: The semiconductor ZnO has gained substantial interest in the research community in part because of its large exciton binding energy (60meV) which could lead to lasing action based on exciton recombination even above room temperature.
Journal ArticleDOI
Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Yong Qing Fu,Yong Qing Fu,Jack Luo,Nam-Trung Nguyen,Anthony J. Walton,Andrew J. Flewitt,Xiaotao Zu,Yifan Li,Glen McHale,Allan Matthews,Enrique Iborra,Hejun Du,William I. Milne,William I. Milne +13 more
TL;DR: In this article, the authors acknowledge support from the Innovative electronic manufacturing research centre (IeMRC) through the EPSRC funded flagship project SMART MICROSYSTEMS.
Journal ArticleDOI
Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering
Fang-Hsing Wang,Chiao-Lu Chang +1 more
TL;DR: In this article, a composite ceramic ZnO target containing 1.5% ZnF 2 and 1.1% Al 2 O 3 was prepared and used to deposit transparent conducting Al and F co-doped zinc oxide (AFZO) thin films on glass substrates by radio frequency magnetron sputtering.
Journal ArticleDOI
Voltage-tunable piezoelectrically-transduced single-crystal silicon micromechanical resonators
TL;DR: In this paper, a new class of high-Q single-crystal silicon (SCS) resonators that are piezoelectrically actuated and sensed, and have voltage-tunable center frequencies are reported.
Journal ArticleDOI
Rapid thermal annealing effects on the structural and optical properties of ZnO films deposited on Si substrates
Yueh-Chien Lee,S.Y. Hu,Walter Water,Kwong-Kau Tiong,Zhe Chuan Feng,Yen-Ting Chen,Jen-Ching Huang,Jyh-Wei Lee,Chia-Chih Huang,Jyi-Lai Shen,Mou-Hong Cheng +10 more
TL;DR: The structural and optical properties of ZnO films deposited on Si substrate following rapid thermal annealing (RTA) have been investigated by X-ray diffraction (XRD), atomic force microscopy (AFM), and photoluminescence (PL) measurements as discussed by the authors.
References
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Journal ArticleDOI
Stress-related effects in thin films
John A. Thornton,D.W. Hoffman +1 more
TL;DR: In this paper, the fundamental nature of the internal stresses that are found in both evaporated and sputtered coatings is reviewed from the point of view of decorative coating applications, which indicate that apparatus geometry is particularly important in determining the state of stress that forms in deposits.
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Influence of postdeposition annealing on the structural and optical properties of sputtered zinc oxide film
Vinay Gupta,Abhai Mansingh +1 more
TL;DR: The influence of postdeposition annealing on the structural and optical properties of rf sputtered insulating zinc oxide films has been investigated in this article, where the optical dispersion data have been fitted to (1) a single oscillator model and (2) the Pikhtin-Yas'kov model.
Journal ArticleDOI
Growth, structure and optical characterization of high quality ZnO thin films obtained by spray pyrolysis
E. Andrade,M. Miki-Yoshida +1 more
TL;DR: In this article, a hexagonal wurtzite crystal type with a mean crystallite size in the range 20-33nm was found in zinc oxide thin films, which are c-axis oriented, having a full width at half-maximum (FWHM) value of the (002) X-ray diffraction line of 0.23°.
Journal ArticleDOI
Sol-gel synthesis of ZnO thin films
TL;DR: In this paper, transparent and crack free thin films of ZnO have been deposited on fused silica, soda glass, silicon wafers and KBr single crystals using the sol-gel technique.
Journal ArticleDOI
Characterization and optimization of zinc oxide films by r.f. magnetron sputtering
Kalpathy B. Sundaram,A. Khan +1 more
TL;DR: In this article, zinc oxide films were deposited by a rf magnetron sputtering using a zinc oxide target and characterized as a function of deposition temperature, pressure, argon-oxygen gas flow ratio, target-substrate distance.
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Influence of postdeposition annealing on the structural and optical properties of sputtered zinc oxide film
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