Scanning X-ray microdiffraction with submicrometer white beam for strain/stress and orientation mapping in thin films.
Nobumichi Tamura,Alastair A. MacDowell,Ralph Spolenak,B. C. Valek,John C. Bravman,W. L. Brown,Richard Celestre,Howard A. Padmore,B. W. Batterman,J. R. Patel +9 more
TLDR
Scanning X-ray microdiffraction (microSXRD) combines the use of high-brilliance synchrotron sources with the latest achromaticX-ray focusing optics and fast large-area two-dimensional-detector technology to study thin aluminium and copper blanket films and lines following electromigration testing and/or thermal cycling experiments.Abstract:
Scanning X-ray microdiffraction (µSXRD) combines the use of high-brilliance synchrotron sources with the latest achromatic X-ray focusing optics and fast large-area two-dimensional-detector technology. Using white beams or a combination of white and monochromatic beams, this technique allows for the orientation and strain/stress mapping of polycrystalline thin films with submicrometer spatial resolution. The technique is described in detail as applied to the study of thin aluminium and copper blanket films and lines following electromigration testing and/or thermal cycling experiments. It is shown that there are significant orientation and strain/stress variations between grains and inside individual grains. A polycrystalline film when investigated at the granular (micrometer) level shows a highly mechanically inhomogeneous medium that allows insight into its mesoscopic properties. If the µSXRD data are averaged over a macroscopic range, results show good agreement with direct macroscopic texture and stress measurements.read more
Citations
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Journal ArticleDOI
A search for evidence of strain gradient hardening in Au submicron pillars under uniaxial compression using synchrotron X-ray microdiffraction
Arief Suriadi Budiman,Seung Min Han,Julia R. Greer,Nobumichi Tamura,J. R. Patel,J. R. Patel,William D. Nix +6 more
TL;DR: In this paper, a search for strain gradients as a possible source of strength for single-crystal submicron pillars of gold subjected to uniform compression was conducted using a sub-micron white-beam (Laue) X-ray diffraction technique.
Journal ArticleDOI
A new white beam x-ray microdiffraction setup on the BM32 beamline at the European Synchrotron Radiation Facility
Olivier Ulrich,X. Biquard,Pierre Bleuet,O. Geaymond,Patrice Gergaud,Jean-Sébastien Micha,Odile Robach,François Rieutord +7 more
TL;DR: A white beam microdiffraction setup has been developed on the bending magnet source BM32 at the European Synchrotron Radiation Facility that allows routine submicrometer beam diffraction to perform orientation and strain mapping of polycrystalline samples.
Journal ArticleDOI
Elastic anisotropy and yield surface estimates of polycrystals
TL;DR: In this paper, a probabilistic yield surface is proposed for polycrystals with anisotropic elastic constitutive behavior, which makes use of the average and the standard deviation of the resolved shear stress on the different slip systems within a given crystalline orientation.
Journal ArticleDOI
Fly-scan ptychography
Xiaojing Huang,Kenneth Lauer,Jesse N. Clark,Weihe Xu,Evgeny Nazaretski,Ross Harder,Ian K. Robinson,Yong S. Chu +7 more
TL;DR: By including multiple mutually incoherent modes into the incident illumination, high quality images were successfully reconstructed from blurry diffraction patterns and this approach significantly increases the throughput of ptychography, especially for three-dimensional applications and the visualization of dynamic systems.
References
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Journal ArticleDOI
Formation of Optical Images by X-Rays
Paul Kirkpatrick,Albert V. Baez +1 more
TL;DR: Several conceivable methods for the formation of optical images by x-rays are considered, and a method employing concave mirrors is adopted as the most promising.
Journal ArticleDOI
A compound refractive lens for focusing high-energy X-rays
TL;DR: In this article, a simple procedure for fabricating refractive lenses that are effective for focusing of X-rays in the energy range 5-40 keV is described, and the problem associated with absorption is minimized by fabricating the lenses from low-atomic-weight materials.
Journal ArticleDOI
Stress generation by electromigration
I. A. Blech,Conyers Herring +1 more
TL;DR: In this article, the authors studied the stresses in aluminum thin films on TiN by transmission x-ray topography and found that the stresses are more compressive in the anode regions.
Journal ArticleDOI
In situ measurement of grain rotation during deformation of polycrystals.
TL;DR: A universal method for providing data on the underlying structural dynamics at the grain and subgrain level based on diffraction with focused hard x-rays is presented.
Journal ArticleDOI
Electromigration path in Cu thin-film lines
TL;DR: For wide polycrystalline lines, the dominant diffusion mechanism is a mixture of grain boundary and surface diffusion, while in narrow lines (< 1 μm) the dominant mechanism is surface transport as mentioned in this paper.
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