Scanning X-ray microdiffraction with submicrometer white beam for strain/stress and orientation mapping in thin films.
Nobumichi Tamura,Alastair A. MacDowell,Ralph Spolenak,B. C. Valek,John C. Bravman,W. L. Brown,Richard Celestre,Howard A. Padmore,B. W. Batterman,J. R. Patel +9 more
TLDR
Scanning X-ray microdiffraction (microSXRD) combines the use of high-brilliance synchrotron sources with the latest achromaticX-ray focusing optics and fast large-area two-dimensional-detector technology to study thin aluminium and copper blanket films and lines following electromigration testing and/or thermal cycling experiments.Abstract:
Scanning X-ray microdiffraction (µSXRD) combines the use of high-brilliance synchrotron sources with the latest achromatic X-ray focusing optics and fast large-area two-dimensional-detector technology. Using white beams or a combination of white and monochromatic beams, this technique allows for the orientation and strain/stress mapping of polycrystalline thin films with submicrometer spatial resolution. The technique is described in detail as applied to the study of thin aluminium and copper blanket films and lines following electromigration testing and/or thermal cycling experiments. It is shown that there are significant orientation and strain/stress variations between grains and inside individual grains. A polycrystalline film when investigated at the granular (micrometer) level shows a highly mechanically inhomogeneous medium that allows insight into its mesoscopic properties. If the µSXRD data are averaged over a macroscopic range, results show good agreement with direct macroscopic texture and stress measurements.read more
Citations
More filters
Journal ArticleDOI
Measuring stresses in thin metal films by means of Raman microscopy using silicon as a strain gage material
TL;DR: In this paper, a modified method of indirect Raman microspectroscopy was proposed to measure stresses with a lateral resolution in the submicrometer range at a laboratory scale.
Journal ArticleDOI
Synchrotron X-Ray Microdiffraction Investigation of Scaling Effects on Reliability for Through-Silicon Vias for 3-D Integration
TL;DR: In this article, the role of the microstructure in creating statistical scatter is demonstrated through microdiffraction measurements of grain orientation correlated with the observed peak widening, which shows that degraded TSV reliability is largely due to the high elastic anisotropy of copper.
Journal ArticleDOI
Intragranular lattice misorientation mapping by synchrotron x-ray micro-beams: laue vs energy-resolved laue vs monochromatic reciprocal space analysis
TL;DR: In this paper, a comparison between the three methods is presented, based on the mapping of a single 311 reflection from a grain within a Ni polycrystal specimen deformed to a tensile plastic strain.
Journal ArticleDOI
Nature and microstructure of gallic imitations of sigillata slips from the la graufesenque workshop
TL;DR: In this article, a combination of transmission electron microscopy (TEM) and X-ray synchrotron diffraction techniques was used to study the microstructure of pre-sigillata slips from the main southern Gaul workshop (La Graufesenque), in order to compare their characteristics with those of high-quality sigillata.
Journal ArticleDOI
X-ray microdiffraction and conventional diffraction from frozen-hydrated biological specimens.
TL;DR: By using this system, diffraction patterns have been recorded from an isolated single myofibril of an insect flight muscle in an area equivalent to a single sarcomere, which is potentially applicable to other micrometer-sized hydrated biological specimens, which are more susceptible to radiation damage than dry synthetic polymers or biopolymers.
References
More filters
Journal ArticleDOI
Formation of Optical Images by X-Rays
Paul Kirkpatrick,Albert V. Baez +1 more
TL;DR: Several conceivable methods for the formation of optical images by x-rays are considered, and a method employing concave mirrors is adopted as the most promising.
Journal ArticleDOI
A compound refractive lens for focusing high-energy X-rays
TL;DR: In this article, a simple procedure for fabricating refractive lenses that are effective for focusing of X-rays in the energy range 5-40 keV is described, and the problem associated with absorption is minimized by fabricating the lenses from low-atomic-weight materials.
Journal ArticleDOI
Stress generation by electromigration
I. A. Blech,Conyers Herring +1 more
TL;DR: In this article, the authors studied the stresses in aluminum thin films on TiN by transmission x-ray topography and found that the stresses are more compressive in the anode regions.
Journal ArticleDOI
In situ measurement of grain rotation during deformation of polycrystals.
TL;DR: A universal method for providing data on the underlying structural dynamics at the grain and subgrain level based on diffraction with focused hard x-rays is presented.
Journal ArticleDOI
Electromigration path in Cu thin-film lines
TL;DR: For wide polycrystalline lines, the dominant diffusion mechanism is a mixture of grain boundary and surface diffusion, while in narrow lines (< 1 μm) the dominant mechanism is surface transport as mentioned in this paper.
Related Papers (5)
Automated indexing for texture and strain measurement with broad-bandpass x-ray microbeams
Jin-Seok Chung,Gene E. Ice +1 more