Scanning X-ray microdiffraction with submicrometer white beam for strain/stress and orientation mapping in thin films.
Nobumichi Tamura,Alastair A. MacDowell,Ralph Spolenak,B. C. Valek,John C. Bravman,W. L. Brown,Richard Celestre,Howard A. Padmore,B. W. Batterman,J. R. Patel +9 more
TLDR
Scanning X-ray microdiffraction (microSXRD) combines the use of high-brilliance synchrotron sources with the latest achromaticX-ray focusing optics and fast large-area two-dimensional-detector technology to study thin aluminium and copper blanket films and lines following electromigration testing and/or thermal cycling experiments.Abstract:
Scanning X-ray microdiffraction (µSXRD) combines the use of high-brilliance synchrotron sources with the latest achromatic X-ray focusing optics and fast large-area two-dimensional-detector technology. Using white beams or a combination of white and monochromatic beams, this technique allows for the orientation and strain/stress mapping of polycrystalline thin films with submicrometer spatial resolution. The technique is described in detail as applied to the study of thin aluminium and copper blanket films and lines following electromigration testing and/or thermal cycling experiments. It is shown that there are significant orientation and strain/stress variations between grains and inside individual grains. A polycrystalline film when investigated at the granular (micrometer) level shows a highly mechanically inhomogeneous medium that allows insight into its mesoscopic properties. If the µSXRD data are averaged over a macroscopic range, results show good agreement with direct macroscopic texture and stress measurements.read more
Citations
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Microstructure effects on the phase transition behavior of a prototypical quantum material
Jan O. Schunck,Florian Döring,Benedikt Rösner,Jens Buck,R. Y. Engel,Piter S. Miedema,Sanjoy K. Mahatha,Moritz Hoesch,A. Petraru,Hermann Kohlstedt,Christian Schüßler-Langeheine,Kai Rossnagel,Christian David,Martin Beer +13 more
TL;DR: In this article , the authors used soft X-ray absorption spectroscopy with a spatial resolution better than 2.5 m to study the insulator-metal transition in vanadium dioxide thin-film microstructures.
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Evolution of ferroelectric domain structures embedded inside polychrystalline BaTiO3 during heating
TL;DR: Ustundag et al. as discussed by the authors investigated the evolution of ferroelectric domains inside a single grain of a polycrystalline BaTiO 3 ceramic by using polychromatic scanning X-ray microdiffraction (µSXRD).
Journal ArticleDOI
Dark-field electron holography as a recording of crystal diffraction in real space: a comparative study with high-resolution X-ray diffraction for strain analysis of MOSFETs
Victor Boureau,Victor Boureau,Aurèle Durand,Aurèle Durand,Patrice Gergaud,Delphine Le Cunff,Matthew Wormington,Denis Rouchon,Alain Claverie,Daniel Benoit,Martin Hÿtch +10 more
TL;DR: In this paper, the role of the geometric phase, which encodes the displacement field of a set of atomic planes in the resulting diffracted beam, is emphasized, and a detailed comparison of experimental results acquired at a synchrotron and with a state-of-the-art transmission electron microscope is presented for the same test structure: an array of dummy metaloxide-semiconductor field effect transistors (MOSFETs) from the 22-nm technology node.
Proceedings ArticleDOI
Effect of thermal and mechanical loadings on the residual stress field in a nickel based superalloy using X-ray Laue microdiffraction
Gader Altinkurt,Mathieu Fèvre,Guillaume Geandier,Odile Robach,Soufiane Guernaoui,Moukrane Dehmas +5 more
TL;DR: In this article, the Laue microdiffraction technique is used to investigate deviatoric strain fields caused by the shot-peening operation and their redistribution after fatigue testing in a nickel-based polycrystalline superalloy with a 40 µm average grain size.
Journal ArticleDOI
Indexing of superimposed Laue diffraction patterns using a dictionary–branch–bound approach
TL;DR: In this article , a dictionary-branch-bound (DBB) method was proposed to determine the orientation of multiple polycrystalline materials simultaneously illuminated by a parallel X-ray incident beam, using only the spot positions in a detector image.
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