Scanning X-ray microdiffraction with submicrometer white beam for strain/stress and orientation mapping in thin films.
Nobumichi Tamura,Alastair A. MacDowell,Ralph Spolenak,B. C. Valek,John C. Bravman,W. L. Brown,Richard Celestre,Howard A. Padmore,B. W. Batterman,J. R. Patel +9 more
TLDR
Scanning X-ray microdiffraction (microSXRD) combines the use of high-brilliance synchrotron sources with the latest achromaticX-ray focusing optics and fast large-area two-dimensional-detector technology to study thin aluminium and copper blanket films and lines following electromigration testing and/or thermal cycling experiments.Abstract:
Scanning X-ray microdiffraction (µSXRD) combines the use of high-brilliance synchrotron sources with the latest achromatic X-ray focusing optics and fast large-area two-dimensional-detector technology. Using white beams or a combination of white and monochromatic beams, this technique allows for the orientation and strain/stress mapping of polycrystalline thin films with submicrometer spatial resolution. The technique is described in detail as applied to the study of thin aluminium and copper blanket films and lines following electromigration testing and/or thermal cycling experiments. It is shown that there are significant orientation and strain/stress variations between grains and inside individual grains. A polycrystalline film when investigated at the granular (micrometer) level shows a highly mechanically inhomogeneous medium that allows insight into its mesoscopic properties. If the µSXRD data are averaged over a macroscopic range, results show good agreement with direct macroscopic texture and stress measurements.read more
Citations
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Proceedings ArticleDOI
Synchrotron X-Ray Microdiffraction Investigation of Scaling Effects on Plasticity and the Correlation to TSV Extrusion
TL;DR: In this paper, the scaling effect of TSV dimensions on plastic deformation and its correlation to the grain growth and extrusion behavior was investigated using Synchrotron x-ray microdiffraction.
Proceedings ArticleDOI
Preferred orientation of 30 μm fine pitch Sn2.5Ag micro-bumps studied by synchrotron polychromatic x-ray Laue microdiffraction
TL;DR: In this article, Synchrotron radiation white beam x-ray microdiffraction was employed to study grain size and orientation of fine pitch Sn2.5Ag micro-bumps.
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Effect of the magnitude of sub-boundary angles on the abnormal grain growth rate of Goss grains in Fe-3%Si steel
TL;DR: In this paper , the effect of the magnitude of sub-boundary angles on selective abnormal grain growth in Fe-3%Si steel was investigated both by computer simulations and experiments.
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Acquisition, Sharing, and Processing of Large Data Sets for Strain Imaging: An Example of an Indented Ni 3 Al/Mo Composite
TL;DR: In this article, the local effects of stress from a mechanical indentation have been studied on a Ni3Al single crystal containing submicron inclusions of molybdenum fibers.
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