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Journal ArticleDOI

Modeling 20-nm Germanium FinFET With the Industry Standard FinFET Model

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TLDR
In this article, the effect of the perpendicular electrical field on hole mobility in germanium FinFETs is investigated and an updated Ge mobility equation is presented to account for this difference.
Abstract
In this letter, we present modeling results for germanium p-type FinFETs using the industry standard Berkeley Spice Common Multi-gate Field Effect Transistor (BSIM-CMG) model. The effect of perpendicular electrical field on hole mobility in germanium FinFETs is found to be different from silicon FinFETs. We present an updated Ge mobility equation to account for this difference. With this single update, BSIM-CMG agrees very well with the measured I-V data of Ge FinFETs with a gate-length from 130 to 20 nm. We conclude that a production quality standard model is available for simulation of circuits employing p-type Ge FinFET.

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Citations
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Journal ArticleDOI

Hexagonal germanium formation at room temperature using controlled penetration depth nano-indentation

TL;DR: The inelastic deformation mechanism is found to depend critically on the indentation penetration depth and can be reliably used to induce phase transformation in Ge-on-Si with technological interest as a narrow band gap material for mid-wavelength infrared detection.
Journal ArticleDOI

Capacitance Modeling in III–V FinFETs

TL;DR: In this paper, a physics-based model of charge density and capacitance for III-V channel double-gate nMOSFETs is presented, which accurately accounts for the impact of quantum capacitance on gate capacitance with applied gate voltage.
Journal ArticleDOI

Compact Model for Geometry Dependent Mobility in Nanosheet FETs

TL;DR: In this article, an updated compact model for mobility in Nanosheet FETs is proposed, which takes all of the effects of nanosheet scaling into account and is implemented in Verilog-A and validated with experimental data.
Journal ArticleDOI

Modeling of nonlinear thermal resistance in FinFETs

TL;DR: In this paper, the authors investigated the thermal resistance of FinFETs with the variation in the number of fin, shape of fin and fin pitch, and proposed a model for thermal resistance behavior correctly with N fin and F pitch variation.
Journal ArticleDOI

Modeling of Charge and Quantum Capacitance in Low Effective Mass III-V FinFETs

TL;DR: A compact model for semiconductor charge and quantum capacitance in III-V channel FETs is presented and is completely explicit and computationally efficient which makes it highly suitable for SPICE implementation.
References
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Journal ArticleDOI

High-Mobility Ge p- and n-MOSFETs With 0.7-nm EOT Using $\hbox{HfO}_{2}/\hbox{Al}_{2}\hbox{O}_{3}/\hbox{GeO}_{x}/\hbox{Ge}$ Gate Stacks Fabricated by Plasma Postoxidation

TL;DR: In this article, an ultrathin equivalent oxide thickness (EOT) HfO2/Al2O3/Ge gate stack has been fabricated by combining the plasma postoxidation method with a 0.2-nm-thick Al 2O3 layer between Hf2 and Ge, resulting in a low interface-state-density (Dit) GeOx/Ge metal-oxide-semiconductor (MOS) interface.
Proceedings ArticleDOI

Non-planar, multi-gate InGaAs quantum well field effect transistors with high-K gate dielectric and ultra-scaled gate-to-drain/gate-to-source separation for low power logic applications

TL;DR: In this paper, a non-planar, multi-gate InGaAs quantum well field effect transistors (QWFETs) with high-K gate dielectric and ultra-scaled gate to drain and gate-to-source separations (L SIDE) of 5nm are reported for the first time.
Journal ArticleDOI

Mosfet carrier mobility model based on gate oxide thickness, threshold and gate voltages

TL;DR: In this paper, the universal dependence of N- and P-MOSFETs carrier mobility on effective vertical field E eff = (ηQ inv + Q b ) ϵ Si has been re-examined.
Journal ArticleDOI

Germanium p-Channel FinFET Fabricated by Aspect Ratio Trapping

TL;DR: In this article, scaled Ge p-channel FinFETs fabricated on a 300mm Si wafer using the aspect-ratio-trapping technique were reported. But, the performance of the Ge pFET was limited by the fact that the trap-assisted tunneling and a band-to-band tunneling leakage mechanism is responsible for an elevated bulk current limiting the OFF-state drain current.
Journal ArticleDOI

Physical understanding of low-field carrier mobility in silicon MOSFET inversion layer

TL;DR: In this article, the gate field dependencies of the low-field mobilities of electrons and holes were studied and it was shown that by changing surface orientations and oxidation conditions the two-dimensional electron gas formulation can successfully explain eta = 1/3 (where eta is the weighting factor of mobile charge density used in calculating the effective field for the universal mobility curve).
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