C
C. Kenyon
Researcher at Intel
Publications - 7
Citations - 3607
C. Kenyon is an academic researcher from Intel. The author has contributed to research in topics: PMOS logic & NMOS logic. The author has an hindex of 7, co-authored 7 publications receiving 3364 citations.
Papers
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Proceedings ArticleDOI
A 45nm Logic Technology with High-k+Metal Gate Transistors, Strained Silicon, 9 Cu Interconnect Layers, 193nm Dry Patterning, and 100% Pb-free Packaging
Kaizad Mistry,C. Allen,C. Auth,B. Beattie,Daniel B. Bergstrom,M. Bost,M. Brazier,M. Buehler,Annalisa Cappellani,R. Chau,C. H. Choi,G. Ding,K. Fischer,Tahir Ghani,R. Grover,W. Han,D. Hanken,M. Hattendorf,J. He,J. Hicks,R. Huessner,D. Ingerly,Pulkit Jain,R. James,L. Jong,Subhash M. Joshi,C. Kenyon,K. Kuhn,K. Lee,Huichu Liu,J. Maiz,B. Mclntyre,P. Moon,J. Neirynck,S. Pae,C. Parker,D. Parsons,Chetan Prasad,L. Pipes,M. Prince,Pushkar Ranade,T. Reynolds,J. Sandford,Lucian Shifren,J. Sebastian,J. Seiple,D. Simon,Swaminathan Sivakumar,Pete Smith,C. Thomas,T. Troeger,P. Vandervoorn,S. Williams,K. Zawadzki +53 more
TL;DR: In this paper, a 45 nm logic technology is described that for the first time incorporates high-k + metal gate transistors in a high volume manufacturing process, resulting in the highest drive currents yet reported for NMOS and PMOS.
Journal ArticleDOI
A 90-nm logic technology featuring strained-silicon
Scott E. Thompson,Mark Armstrong,C. Auth,Mohsen Alavi,M. Buehler,R. Chau,S. Cea,Tahir Ghani,G. Glass,T. Hoffman,Chia-Hong Jan,C. Kenyon,Jason Klaus,K. Kuhn,Z. Ma,B. McIntyre,Kaizad Mistry,Anand Portland Murthy,B. Obradovic,Ramune Nagisetty,P. Nguyen,Swaminathan Sivakumar,R. Shaheed,Lucian Shifren,B. Tufts,S. Tyagi,M. Bohr,Y. El-Mansy +27 more
TL;DR: In this paper, a leading-edge 90-nm technology with 1.2-nm physical gate oxide, 45-nm gate length, strained silicon, NiSi, seven layers of Cu interconnects, and low/spl kappa/CDO for high-performance dense logic is presented.
Proceedings ArticleDOI
A 22nm high performance and low-power CMOS technology featuring fully-depleted tri-gate transistors, self-aligned contacts and high density MIM capacitors
C. Auth,C. Allen,A. Blattner,Daniel B. Bergstrom,Mark R. Brazier,M. Bost,M. Buehler,V. Chikarmane,Tahir Ghani,Timothy E. Glassman,R. Grover,W. Han,D. Hanken,Michael L. Hattendorf,P. Hentges,R. Heussner,J. Hicks,D. Ingerly,Pulkit Jain,S. Jaloviar,Robert James,David Jones,J. Jopling,Subhash M. Joshi,C. Kenyon,Huichu Liu,R. McFadden,B. McIntyre,J. Neirynck,C. Parker,L. Pipes,Ian R. Post,S. Pradhan,M. Prince,S. Ramey,T. Reynolds,J. Roesler,J. Sandford,J. Seiple,Pete Smith,Christopher D. Thomas,D. Towner,T. Troeger,Cory E. Weber,P. Yashar,K. Zawadzki,Kaizad Mistry +46 more
TL;DR: In this paper, a 22nm generation logic technology is described incorporating fully-depleted tri-gate transistors for the first time, which provides steep sub-threshold slopes (∼70mV/dec) and very low DIBL ( ∼50m V/V).
Proceedings ArticleDOI
A 14nm logic technology featuring 2 nd -generation FinFET, air-gapped interconnects, self-aligned double patterning and a 0.0588 µm 2 SRAM cell size
Sanjay Natarajan,M. Agostinelli,S. Akbar,M. Bost,A. Bowonder,V. Chikarmane,S. Chouksey,A. Dasgupta,K. Fischer,Q. Fu,Tahir Ghani,M. Giles,S. Govindaraju,R. Grover,W. Han,D. Hanken,E. Haralson,M. Haran,M. Heckscher,R. Heussner,Pulkit Jain,R. James,R. Jhaveri,I. Jin,Hei Kam,Eric Karl,C. Kenyon,Mark Y. Liu,Y. Luo,R. Mehandru,S. Morarka,L. Neiberg,Paul A. Packan,A. Paliwal,C. Parker,P. Patel,R. Patel,C. Pelto,L. Pipes,P. Plekhanov,M. Prince,S. Rajamani,J. Sandford,Sell Bernhard,Swaminathan Sivakumar,Pete Smith,B. Song,K. Tone,T. Troeger,J. Wiedemer,M. Yang,Kevin Zhang +51 more
TL;DR: In this paper, a 14nm logic technology using 2nd-generation FinFET transistors with a novel subfin doping technique, self-aligned double patterning (SADP) for critical patterning layers, and air-gapped interconnects at performance-critical layers is described.
Proceedings ArticleDOI
A 90 nm logic technology featuring 50 nm strained silicon channel transistors, 7 layers of Cu interconnects, low k ILD, and 1 /spl mu/m/sup 2/ SRAM cell
Scott E. Thompson,Nidhi Anand,Mark Armstrong,C. Auth,B. Arcot,Mohsen Alavi,P. Bai,J. Bielefeld,Robert M. Bigwood,J. Brandenburg,M. Buehler,Stephen M. Cea,V. Chikarmane,C. H. Choi,R. Frankovic,Tahir Ghani,G. Glass,W. Han,Thomas Hoffmann,Makarem A. Hussein,P. Jacob,Ajay Jain,Chia-Hong Jan,Subhash M. Joshi,C. Kenyon,Jason Klaus,S. Klopcic,J. Luce,Z. Ma,B. McIntyre,Kaizad Mistry,Anand Portland Murthy,P. Nguyen,H. Pearson,T. Sandford,R. Schweinfurth,R. Shaheed,Swaminathan Sivakumar,M. Taylor,B. Tufts,Charles H. Wallace,P.-H. Wang,Cory E. Weber,Mark T. Bohr +43 more
TL;DR: In this paper, a leading edge 90 nm technology with 1.2 nm physical gate oxide, 50 nm gate length, strained silicon, NiSi, 7 layers of Cu interconnects, and low k carbon-doped oxide (CDO) for high performance dense logic is presented.