scispace - formally typeset
Proceedings ArticleDOI

Competitive and cost effective high-k based 28nm CMOS technology for low power applications

TLDR
In this article, the authors present a cost-effective 28nm CMOS technology for low power (LP) applications based on a high-k, single-metal gate-first architecture.
Abstract
In this paper, we present a cost-effective 28nm CMOS technology for low power (LP) applications based on a high-k, single-metal-gate-first architecture. We report raw gate densities up to 4200 kGate/mm2, and, using the ARM Cortex-R4F as a reference, we report achievement of an overall 2.4x area reduction in 28nm from 45nm technology. Our high-density SRAM bit-cell (area= 0.120mm2) has a demonstrated Static Noise Margin (SNM) of 213mV at 1V. Fully compatible with power/leakage management techniques intensively used in low power designs, the transistor drive currents are increased +35% & +10%, for nFET and pFET respectively, with respect to a 28nm LP poly/SiON reference [3]. Compatible with LP system-on-chip requirements, ultra low-cost, high performance analog devices are reported which leverage a dramatic improvement in matching factor (AVT∼2mV.um) versus our previously-reported result [2]. An optimized interconnection scheme based on Extreme Low k (ELK) dielectric (k∼2.4) and advanced metallization allows high density wiring with competitive R-C versus our previous technology.

read more

Citations
More filters
Journal ArticleDOI

Process Technology Variation

TL;DR: The importance of process variation in modern transistor technology is discussed, front-end variation sources are reviewed, device and circuit variation measurement techniques are presented, and recent intrinsic transistor variation performance from the literature is compared.
Journal ArticleDOI

SRAM Assist Techniques for Operation in a Wide Voltage Range in 28-nm CMOS

TL;DR: In this article, the authors use importance sampling of dynamic failure metrics to quantify and analyze the effect of different assist techniques, array organization, and timing on Vmin at design time, and demonstrate that the most effective technique for reducing SRAM Vmin is the negative bitline write assist.
Proceedings ArticleDOI

Challenges in the characterization and modeling of BTI induced variability in metal gate / High-k CMOS technologies

TL;DR: In this paper, a parallel BTI testing procedure is introduced for discrete MG/HK devices to demonstrate a correlation between time-zero VT and ΔVT and illustrate the minor impact of BTI induced variability on post-stress VT distributions relevant for modeling the circuit aging.
Journal ArticleDOI

A 10 nm FinFET 128 Mb SRAM With Assist Adjustment System for Power, Performance, and Area Optimization

TL;DR: The various SRAM assist schemes are explored to evaluate the power, performance, and area (PPA) gain, and the figure-of-merit (FOM) is induced by the minimum operating voltage (VMIN) and assist overheads.
Journal ArticleDOI

A Comprehensive Benchmark and Optimization of 5-nm Lateral and Vertical GAA 6T-SRAMs

TL;DR: In this paper, an intensive study of 6T-SRAM designs for vertical gate-all-around (GAA) transistors and lateral GAA transistors (LFETs) using 5-nm node design rules is presented.
Related Papers (5)