Varian Associates

About: Varian Associates is a based out in . It is known for research contribution in the topics: Beam (structure) & Wafer. The organization has 2160 authors who have published 2591 publications receiving 46002 citations.

Physical vapor deposition employing ion extraction from a plasma

Abstract: A sputter magnetron ion source for producing an intense plasma in a cathode container which ionizes a high and substantial percentage of the sputter cathode material and means for extracting the ions of the cathode material in a beam. The ion extraction means is implemented by a magnetic field cusp configuration with a null region adjacent to the open end of the cathode container. Ions so produced are able to be directed at right angles to a substrate being coated for efficient via filling.

Mode suppression means for gyrotron cavities

Abstract: In a gyrotron electron tube of the gyro-klystron or gyro-monotron type, having a cavity supporting an electromagnetic mode with circular electric field, spurious resonances can occur in modes having noncircular electric field. These spurious resonances are damped and their frequencies shifted by a circular groove in the cavity parallel to the electric field.

Couplers for extracting RF power from a gyrotron cavity directly into fundamental mode waveguide

Abstract: In a gyrotron cavity resonator, generated energy is extracted into a symmetric set of fundamental-mode waveguides (34) by ports (30, 32) disposed to couple energy in phase from the operating electromagnetic mode but in anti-phase with respect to an unwanted mode of lower cutoff frequency than the operating mode, thereby neutralizing coupling to the unwanted mode. A second set of interspersed ports may be disposed to load degenerate, orthogonal modes.

Mode suppressors for whispering gallery gyrotron

Abstract: A gyrotron interaction resonator 29 operating in a TEn1 cavity mode has an array of longitudinal slots 32 in the conductive wall 30. The slots 32 are spaced to couple to the unwanted TEn1 modes and to other modes of differing n and not to the desired mode. Wave-absorptive material 34 spaced from the inner cavity wall 28 and coupled to slots 32 absorbs the unwanted modes.