Varian Associates

About: Varian Associates is a based out in . It is known for research contribution in the topics: Beam (structure) & Wafer. The organization has 2160 authors who have published 2591 publications receiving 46002 citations.

Magnetron sputter device using the same pole piece for coupling separate confining magnetic field to separate targets subject to separate discharges

Abstract: A magnetron sputter device includes separate first and second targets over which first and second discharges are formed by separate ionizing electric fields and separate confining magnetic fields. The separate confining magneticfields include first and second magnetic circuits through the first and second targets, respectively. The first magnetic circuit includes first and second pole pieces for coupling magnetic flux from a first magnetic field source to the first target. The second magnetic circuit includes the second pole piece and a third pole piece for coupling magnetic flux from a second magnetic field source to the second target. The magnetic circuits and the magnetic field sources are arranged so that magnetic fluxes from the first and second magnetic field sources flow in opposite directions through the second pole piece.

Anti-stick electrostatic chuck for a low pressure environment

Abstract: An electrostatic chuck (4) for holding a workpiece (2) in a low pressure environment. The chuck (4) comprises a dielectric substrate (8) fabricated of a material that does not contain polar molecules that are free to move in response to the application of an electric field (V). This avoids the problem of the workpiece (2) sticking to the chuck (4) after the energizing voltage (V) has been removed. In an environment in which high temperatures are employed, the dielectric (8) is coupled to a metallic heat conductor (23) via a plurality of metallic pins (22) that couple heat and are free to flex in response to motion caused by differentials in thermal expansion coefficients between the metal (23) and the dielectric (8). The chuck (4) is preferably fabricated from two substantially planar dielectric members (30,33) sandwiched around a brazing compound (11,13) which become electrically conductive electrodes (11,13) after the assembly is heated and then cooled.

A ladder circuit coupled-cavity TWT at 80-100 GHz

Abstract: The radar, electronic warfare and communications industries will benefit from the recent development of a new family of coupled-cavity traveling wave tubes The new tubes, given the generic name of MILLITRONS can now provide these industries with affordable and available devices for high power millimeter wave transmitters Conventional techniques for manufacturing coupled-cavity traveling wave tubes become impractical for millimeter wave frequencies because of extremely tight tolerances The ladder is a new circuit which eliminates cumulative errors of stacked tubes by a method of simultaneously machining cavities of a circuit The MILLITRON uniquely incorporates ladder technology in the development of millimeter wave devices A recent accomplishment is a 100 W CW coupled-cavity traveling wave tube operating from 80 to 100 GHz

Evaluation of New Microparticulate Packings for Aqueous Steric Exclusion Chromatography

Abstract: Two types of high performance aqueous size exclusion columns have recently been developed, one a rigid spherical silica-based packing containing a new hydrophilic bonded phase (MicroPak TSK Gel Type SW) and the other an organic-based, semi-rigid gel (MicroPak TSK Gel Type PW). Characteristics of MicroPak TSK SW and PW columns were compared to other commercially available aqueous SEC columns packed with similar supports. Chromatographic performance of prepacked columns containing microparticulate support materials were compared for exclusion separations of water-soluble organic polymers, biopolymers, and small water-soluble oligomers. Amino acid probes were used to investigate non-exclusion effects of MicroPak TSK SW and PW columns.