Varian Associates

About: Varian Associates is a based out in . It is known for research contribution in the topics: Beam (structure) & Wafer. The organization has 2160 authors who have published 2591 publications receiving 46002 citations.

Isolation valve for vacuum and non-vacuum application

Abstract: An isolation valve includes a housing having a port and a seal plate for sealing the port. The seal plate is linked to a shaft which carries a guide frame. To close the port, a drive mechanism drives the shaft linearly in one direction. The seal plate first moves linearly with the shaft until the guide frame stops against the housing. The seal plate then moves linearly in a direction perpendicular to a surface of the housing containing the port until it seals the port. Motion of the drive shaft in the opposite direction causes the seal plate to retrace its path. In one embodiment, the valve includes a second seal plate for sealing a second port. A spring between the guide means and the shaft provides pre-load which maintains the seal plates in a retracted position until the frame stops against the housing. An extension spring between the first and second seal plates eliminates play in the link mechanism and extends valve life.

Waveguide load having reflecting structure for diverting microwaves into absorbing fluid

Abstract: A calorimetric load for very high microwave power at very high frequencies is formed by a metallic, cylindrical chamber into which the wave-guide carrying the power opens. Inside the metallic cylinder is a coaxial dielectric cylinder, with a space between full of circulating wave-absorbing fluid such as water. The incoming wave may be in a higher-order mode. To make it disperse rapidly into the absorbing fluid, a conical reflector is located inside the dielectric cylinder to reflect the wave outward.

Automatic sampler apparatus of modular construction

Abstract: A system for injecting sample fluids into an analyzer and processing the analysis data is disclosed. The system comprises a fluid sample analyzer, a sample storage module for a number of fluid samples, an injection module by which samples are injected into the analyzer, a data recording or processing device, and a control module for governing and sequencing the operation of the system. The injection module and the storage module are configured to permit alternate orientations to facilitate horizontal or vertical injection without disconnecting of interconnecting conduits.

Handhabungsarm fuer halbleitersubstrate

Abstract: A modular wafer processing system requires a wafer handling arm with a minimum of moving or sliding surfaces which can generate dust. The arm is constructed of a first rigid arm (252) pivoted on the axis of a fixed cam (24) and a second rigid arm (256) with a wafer holder (280). A pulley (254) is rotatably mounted on the axis (272) of the pivot of the arms and a belt (243) extends around the pulley (254) and the cam (242). The belt (243) is fixed to the cam (242) at a point (242f). The arm is used in a wafer handling apparatus provided with reduced atmosphere chambers in modules (200a, 200b), Fig. 1 (not shown), to which process modules (301a, 301b) are attached. Gate value modules (100a, 100b etc) are provided between the chamber and process modules.