Varian Associates

About: Varian Associates is a based out in . It is known for research contribution in the topics: Beam (structure) & Wafer. The organization has 2160 authors who have published 2591 publications receiving 46002 citations.

Conversion of circular dichroism spectropolarimeter to linear dichroism measurement mode

Abstract: For use in a spectropolarimeter having an electromagnetic radiation beam source, a detector, a linear polarizer in the path of the beam between said source and detector, and first converter means in said path and characterized as operable to convert linearly polarized radiation to elliptically polarized radiation, the combination comprising:

Flow splitting device for fluid flow meter.

Abstract: Dispositif de division d'ecoulement (10) destine a etre utilise dans des debitmetres de fluide et analogues comprenant un boitier exterieur (12) formant une cavite possedant un orifice d'entree (28) et un orifice de sortie (30), un ecran poreux (32) divisant la cavite en une chambre d'entree (35) et une chambre de sortie (37), un bouchon fendu (42) dont une extremite s'emboite dans la surface de l'ecran situee devant la chambre de sortie et un tube (62) s'etendant au travers du boitier en communication avec le bouchon, et une extremite opposee (60) s'etendant au travers du boitier et en communication avec la chambre de sortie. Device for flow division (10) designed to be used in fluid flow meters and the like comprising an outer housing (12) forming a cavity possessing an input port (28) and an outlet (30), a screen porous (32) dividing the cavity into an entry chamber (35) and an outlet chamber (37), a slotted plug (42) whose one end connects to the end in the surface of the screen situated in front of the outlet chamber and a tube (62) extending through the housing in communication with the cap, and an opposite end (60) extending through the housing and in communication with the outlet chamber. La partie exterieure du tube (62) peut etre couplee a un dispositif de detection pour la mesure de l'ecoulement divise au travers de celle-ci. The external part of the tube (62) can be coupled to a detection device for measuring the flow divides through thereof.

High current mass spectrometer using space charge lens

Abstract: Charged particle beam apparatus includes a source 6, 8, 10, 12, 14 for forming a charged particle beam 18 along a beam axis, a mass analyzing magnet 22 for imposing on the beam 18 a magnetic field perpendicular to the beam axis, a resolving slit 24 downstream of the analyzing magnet 22 and a space charge lens 20 positioned between the source and the analyzing magnet in close proximity to the magnet entrance. The apparatus provides a mass spectrometer with high current capability while maintaining the size and weight of the system within acceptable limits. The apparatus is particularly useful in ion implantation systems.