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Journal ArticleDOI

Transparent ZnO thin-film transistor fabricated by rf magnetron sputtering

P. F. Carcia, +3 more
- 10 Feb 2003 - 
- Vol. 82, Iss: 7, pp 1117-1119
TLDR
In this paper, the authors fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature, and the best devices had field effect mobility of more than 2 cm2/V and an on/off ratio>106.
Abstract
We fabricated ZnO thin-film transistors by rf magnetron sputtering on Si substrates held near room temperature. The best devices had field-effect mobility of more than 2 cm2/V s and an on/off ratio>106. These ZnO films had resistivity ∼105 ohm cm, with high optical transparency (>80% for wavelength >400 nm), and compressive stress <0.5 GPa. The combination of transparency in the visible, excellent transistor characteristics, and low-temperature processing makes ZnO thin-film transistors attractive for flexible electronics on temperature sensitive substrates.

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Citations
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Proceedings ArticleDOI

Post annealing temperature effect on photoluminescence spectroscopy of ZnO thin film

TL;DR: In this paper, the effect of annealing temperature on the photoluminescence (PL) properties of ZnO thin film was investigated. But the authors did not consider the effect on the optical, structure and electrical properties.

Development of n-ZnO/p-Si single heterojunction solar cell with and without interfacial layer

Babar Hussain
TL;DR: In this paper, a simulation and experimental results related to n-ZnO/p-Si SHJSC are presented to fill the gaps in the literature related to NZN and p-Si single homojunction solar cells.
Journal ArticleDOI

Influence of post-deposition annealing on the electrical properties of zinc oxide thin films

TL;DR: In this article, the influence of post-deposition annealing temperature and the use of different ambient gases on the structural and electrical properties of zinc oxide thin films grown by atomic layer deposition was investigated.
Book ChapterDOI

Introduction to Solution - Deposited Inorganic Electronics

TL;DR: Moore's Law as mentioned in this paper has been widely discussed in the electronics research community and has been an engine for worldwide economic growth because it results in faster and more compact products for computing and communications.
Journal ArticleDOI

Thin film transistors based on TiO2 fabricated by using radio-frequency magnetron sputtering

TL;DR: In this paper, the authors demonstrated that nanocrystalline TiO2 thin films were deposited on ITO/glass substrate by radio-frequency magnetron sputtering and showed that the devices exhibited enhancement mode characteristics with the threshold voltage of 7.5 V.
References
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Book

Elements of X-ray diffraction

TL;DR: In this article, the authors present a chemical analysis of X-ray diffraction by Xray Spectrometry and phase-diagram Determination of single crystal structures and phase diagrams.
Journal ArticleDOI

Organic-inorganic hybrid materials as semiconducting channels in thin-film field-effect transistors

TL;DR: A thin-film field-effect transistor having an organic-inorganic hybrid material as the semiconducting channel was demonstrated and molecular engineering of the organic and inorganic components of the hybrids is expected to further improve device performance for low-cost thin- film transistors.
Book

Thermodynamics of solids

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